Prediction Model and Experimental Verification of Surface Roughness of Single Crystal Diamond Chemical Mechanical Polishing Based on Archimedes Optimization Algorithm. [PDF]
Micromachines (Basel)Li Z +5 more
europepmc +1 more source
Chemical Mechanical Polishing of Zerodur<sup>®</sup> Using Silica and Ceria Nanoparticles: Toward Ultra-Smooth Optical Surfaces. [PDF]
Nanomaterials (Basel)Bellahsene H +10 more
europepmc +1 more source
Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. [PDF]
Micromachines (Basel)Ye G, Yao Z.
europepmc +1 more source
Correction: Ye, G.; Yao, Z. Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. <i>Micromachines</i> 2025, <i>16</i>, 450. [PDF]
Micromachines (Basel)Ye G, Yao Z.
europepmc +1 more source
Chemical mechanical polishing as an alternative surface treatment technique for corrosion prevention of carbon steel in an acidic medium. [PDF]
Sci RepAhmed M +6 more
europepmc +1 more source
Interaction mechanism of Al2O3 abrasive in tantalum chemical mechanical polishing. [PDF]
RSC AdvLei R +7 more
europepmc +1 more source
Preliminary Study on Fluidized Bed Chemical Mechanical Polishing (FB-CMP) Process for Stainless Steel 304 (SS304). [PDF]
Micromachines (Basel), 2020 Kim T, Lee H.
europepmc +1 more source
Effect of Structurally Modified Toluene Diisocyanate-Based Polyurethane Pads on Chemical Mechanical Polishing of 4H Silicon Carbide Substrate. [PDF]
Polymers (Basel)Meng Y, Zhang S, Zhang Z.
europepmc +1 more source
The Stability Evaluation of Ceria Slurry Using Polymer Dispersants with Varying Contents for Chemical Mechanical Polishing Process. [PDF]
Polymers (Basel)Hwang S, Park J, Kim W.
europepmc +1 more source
Optimization of polishing fluid composition for single crystal silicon carbide by ultrasonic assisted chemical-mechanical polishing. [PDF]
Sci RepYe L +6 more
europepmc +1 more source