A Hybrid Strategy for Profile Measurement of Micro Gear Teeth [PDF]
Micromachines, 2023 A hybrid strategy is proposed to meet the challenge of obtaining the profile of micro gear teeth with a small modulus. Firstly, the contact probe segmentally obtained the falling flank profiles with an auxiliary lifting mechanism to avoid interference ...
Guangyao Huang +5 more
doaj +2 more sources
An Off-Axis Differential Method for Improvement of a Femtosecond Laser Differential Chromatic Confocal Probe [PDF]
Applied Sciences, 2020 This paper presents an off-axis differential method for the improvement of a femtosecond laser differential chromatic confocal probe having a dual-detector configuration.
Chong Chen +4 more
doaj +2 more sources
Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser
Applied Sciences, 2022 This paper presents an intentional investigation of the effect of the object tilt angle on the tracking local minimum method (TL method), which is the one for detecting the measurement target position of the object optical axis, in a chromatic confocal ...
Ryo Sato +3 more
doaj +3 more sources
Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm [PDF]
Sensors, 2019 Chromatic confocal technology (CCT) is one of the most promising methods for the contactless and accurate measurement of structure profiles. Based on the principles of chromatic dispersion and confocal theory, a dispersion probe is proposed and optimized
Jiao Bai +4 more
doaj +3 more sources
A diffractive element-based chromatic confocal thickness measurement device and thickness correction method [PDF]
iScienceSummary: Wafer thickness is a critical parameter in semiconductor manufacturing, influencing production costs, and chip performance. Traditional measurement methods using clamping devices often introduce errors due to uneven positioning or unstable ...
Zhisong Li +6 more
doaj +2 more sources
A Method for Expansion of Z-Directional Measurement Range in a Mode-Locked Femtosecond Laser Chromatic Confocal Probe [PDF]
Applied Sciences, 2019 A method is proposed to expand the Z-directional measurement range of a fiber-based dual-detector chromatic confocal probe with a mode-locked femtosecond laser source.
Chong Chen +5 more
doaj +2 more sources
Investigation and Improvement of Thermal Stability of a Chromatic Confocal Probe with a Mode-Locked Femtosecond Laser Source [PDF]
Applied Sciences, 2019 An intentional investigation on the thermal stability of a mode-locked femtosecond laser chromatic confocal probe, which is a critical issue for the probe to be applied for long-term displacement measurement or surface profile measurement requiring long ...
Ryo Sato +4 more
doaj +2 more sources
Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2021 Aspherical or free-form optical surface machining using an ultra-precision machine tool is a common and effective method used in the manufacturing of precision optics.
Hao DUAN +4 more
doaj +3 more sources
Three-Probe Error Separation with Chromatic Confocal Sensors for Roundness Measurement [PDF]
Nanomanufacturing and Metrology, 2021 AbstractIn this study, three-probe error separation was developed with three chromatic confocal displacement sensors for roundness measurement. Here, the harmonic suppression is discussed first to set suitable orientation angles among three sensors. Monte Carlo simulation is utilized to test the error separation and optimize the orientation angles and ...
Jiao Bai +5 more
openaire +1 more source
Profile Measurement Using Confocal Chromatic Probe on Ultrahigh Precision Machine Tool
International Journal of Automation Technology, 2021 An on-machine measurement (OMM) system is an effective apparatus for achieving an efficient profile compensation and improving machining conditions in ultrahigh precision machining. Herein, we report a new OMM system with a confocal chromatic probe on a five-axis ultrahigh precision machine tool constructed using a real-time position capturing method ...
Hao Duan +4 more
openaire +1 more source