Results 1 to 10 of about 339 (90)
CMOS MEMS Design and Fabrication Platform
Frontiers in Mechanical Engineering, 2022 This article mainly describes the technology related to the CMOS MEMS process platform provided by the Taiwan Semiconductor Research Institute (TSRI), including the process flow, design verification, back-end dicing, and packaging of the CMOS MEMS ...
Sheng-Hsiang Tseng
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A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization
Micromachines, 2021 CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical ...
Sebastià A. Bota +2 more
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CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor
Micro and Nano Systems Letters, 2021 LC CMOS voltage-controlled oscillators (VCOs) with tunable inductors are essential for high-performance, multi-band communication systems, such as IoT applications and 5G communication.
Jeong-Geun Kim, Il-Joo Cho, Hyun-Yong Yu
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CMOS MEMS Fabrication Technologies and Devices
Micromachines, 2016 This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators.
Hongwei Qu
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Experiments on MEMS Integration in 0.25 μm CMOS Process
Sensors, 2018 In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology.
Jordi Madrenas Boadas +2 more
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Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators
Sensors, 2018 We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level.
Sebastià A. Bota +2 more
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A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
Sensors, 2011 This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive
Hongwei Qu
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Design and Applications of Integrated Transducers in Commercial CMOS Technology
Frontiers in Mechanical Engineering, 2022 Monolithic integration of Microelectromechanical Systems (MEMS) directly within CMOS technology offers enhanced functionality for integrated circuits (IC) and the potential improvement of system-level performance for MEMS devices in close proximity to ...
Udit Rawat +2 more
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CMOS-MEMS Oscillator Architecture and Phase Noise: A Mini-Review
Frontiers in Mechanical Engineering, 2022 Over the past two decades, the advancement in microelectromechanical systems (MEMS) has been making headway in the development of miniaturized mechanical structures with integrated electronics.
Ming-Huang Li
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CMOS-MEMS Vibro-Impact Devices and Applications
Frontiers in Mechanical Engineering, 2022 CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics have been shown to yield unique and unprecedented functionalities with on-chip integration capability.
Chun-Pu Tsai, Wei-Chang Li
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