CMOS MEMS Fabrication Technologies and Devices [PDF]
Micromachines, 2016 This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators.
Hongwei Qu
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Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers [PDF]
Microsystems & Nanoengineering, 2022 This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes.
J. J. Valle +3 more
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A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization [PDF]
Micromachines, 2021 CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical ...
Rafel Perelló-Roig +3 more
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CMOS MEMS Design and Fabrication Platform
Frontiers in Mechanical Engineering, 2022 This article mainly describes the technology related to the CMOS MEMS process platform provided by the Taiwan Semiconductor Research Institute (TSRI), including the process flow, design verification, back-end dicing, and packaging of the CMOS MEMS ...
Sheng-Hsiang Tseng
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Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach [PDF]
Micromachines, 2018 The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS)
Haotian Liu +3 more
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Fabrication and Characterization of a CMOS-MEMS Humidity Sensor [PDF]
Sensors, 2015 This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the ...
John-Ojur Dennis +2 more
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Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis [PDF]
Microsystems & Nanoengineering, 2023 Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology applications. For such a direct CMOS-
Avisek Roy +3 more
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Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide [PDF]
Sensors, 2020 In this research, a new application of reduced graphene oxide (rGO) for a complementary metal-oxide-semiconductor (CMOS)-MEMS infrared (IR) sensor and emitter is proposed.
Shu-Jung Chen, Bin Chen
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Implementation of a CMOS/MEMS Accelerometer with ASIC Processes [PDF]
Micromachines, 2019 This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using
Yu-Sian Liu, Kuei-Ann Wen
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Curvature of BEOL cantilevers in CMOS-MEMS processes [PDF]
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Barrachina, Laura +3 more
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