Results 11 to 20 of about 227,472 (115)
A descriptive model of the current microelectromechanical systems (MEMS) development process [PDF]
, 2009 This paper uses the IDEFØ process modelling technique to present an ‘As-Is' model for the current process of developing generic MEMS devices, this new model is based on information from current practitioners.
Alcock, Jeffrey R. +2 more
core +7 more sources
Multi-level and multidisciplinary optimisation of microelectromechanical systems [PDF]
, 2012 A comparative investigation into the role multi-level and multidisciplinary design optimisation can play in the automated design synthesis of microelectromechanical systems (MEMS) is presented.
Farnsworth, Michael
core +7 more sources
Manufacturing Issues of BEOL CMOS-MEMS Devices
IEEE Access, 2021 In this paper we present a comprehensive report on the issues found during the manufacturing of high-yield CMOS-MEMS sensors based on vapor-phase hydrogen fluoride (vapor- $HF$ ) oxide etching.
Juan Valle +3 more
doaj +1 more source
Microsystems & Nanoengineering, 2023 Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology applications. For such a direct CMOS-
Avisek Roy +3 more
doaj +1 more source
Test support strategies for MEMS [PDF]
, 1999 Integrated test technology is becoming critically important for MEMS due to the high reliability and safety critical applications targeted. High quality levels in production require efficient test strategies that are properly validated.
Rosing, Richard +3 more
core +4 more sources
Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide
Sensors, 2020 In this research, a new application of reduced graphene oxide (rGO) for a complementary metal-oxide-semiconductor (CMOS)-MEMS infrared (IR) sensor and emitter is proposed.
Shu-Jung Chen, Bin Chen
doaj +1 more source
Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers
Microsystems & Nanoengineering, 2022 This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes.
J. J. Valle +3 more
doaj +1 more source
Implementation of a CMOS/MEMS Accelerometer with ASIC Processes
Micromachines, 2019 This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using
Yu-Sian Liu, Kuei-Ann Wen
doaj +1 more source
Frontiers in Mechanical Engineering, 2022 MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
doaj +1 more source
CMOS-MEMS for RF and Physical Sensing Applications
, 2022 With the emergence of 5G/mm-Wave communication, there is a growing need for novel front-end electromechanical devices in filtering and carrier generation applications.
Udit Rawat (13834036)
core +1 more source