Results 11 to 20 of about 392,135 (196)
System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC [PDF]
Microsystems & NanoengineeringWe present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor ...
Linze Hong +4 more
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Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach [PDF]
Micromachines, 2018 The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS)
Haotian Liu +3 more
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Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique [PDF]
Micromachines, 2020 This study describes the fabrication of an ammonia gas sensor (AGS) using a complementary metal oxide semiconductor (CMOS)–microelectromechanical system (MEMS) technique.
Po-Jen Shih +2 more
exaly +3 more sources
CMOS-MEMS Vibro-Impact Devices and Applications
Frontiers in Mechanical Engineering, 2022 CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics have been shown to yield unique and unprecedented functionalities with on-chip integration capability.
Chun-Pu Tsai, Wei-Chang Li
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A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor [PDF]
Micromachines, 2019 This paper presents the design, fabrication, and characterization of an inductive complementary metal oxide semiconductor micro-electromechanical systems (CMOS-MEMS) accelerometer with on-chip digital output based on LC oscillators.
Yi Chiu, Hsuan-Wu Liu, Hao-Chiao Hong
doaj +2 more sources
Experiments on MEMS Integration in 0.25 μm CMOS Process
Sensors, 2018 In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology.
Jordi Madrenas +2 more
exaly +3 more sources
Frontiers in Mechanical Engineering, 2022 MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
doaj +2 more sources
Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing [PDF]
Sensors, 2020 Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing.
Rafel Perello-Roig +3 more
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Fabrication and characterization of CMOS-MEMS magnetic microsensors. [PDF]
Sensors (Basel), 2013 This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force.
Hsieh CH, Dai CL, Yang MZ.
europepmc +5 more sources
The Fringe-Capacitance of Etching Holes for CMOS-MEMS [PDF]
Micromachines, 2015 Movable suspended microstructures are the common feature of sensors or devices in the fields of Complementary-Metal-Oxide-Semiconductors and Micro-Electro-Mechanical Systems which are usually abbreviated as CMOS-MEMS. To suspend the microstructures, it is commonly to etch the sacrificial layer under the microstructure layer.
Pei-Zen Chang +2 more
exaly +3 more sources