A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor [PDF]
Micromachines, 2019 This paper presents the design, fabrication, and characterization of an inductive complementary metal oxide semiconductor micro-electromechanical systems (CMOS-MEMS) accelerometer with on-chip digital output based on LC oscillators.
Yi Chiu, Hsuan-Wu Liu, Hao-Chiao Hong
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Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators [PDF]
Sensors, 2018 We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level.
Rafel Perelló-Roig +3 more
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System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC [PDF]
Microsystems & NanoengineeringWe present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor ...
Linze Hong +4 more
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Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing [PDF]
Sensors, 2020 Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing.
Rafel Perello-Roig +3 more
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Experiments on MEMS Integration in 0.25 μm CMOS Process
Sensors, 2018 In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology.
Piotr Michalik +4 more
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Integration and Encapsulation of Light-Emitting Diode and CMOS-MEMS Chips for Fluorescence Quenching Gas Sensor [PDF]
Frontiers in Mechanical Engineering, 2022 Environmental sensing units such as gas sensors, humidity sensors, pressure sensors, PM 2.5 sensors, or temperature sensors are widely used in our daily lives. In this study, CMOS-MEMS technology is exploited to fabricate and monolithically integrate the
Ya-Chu Lee +5 more
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Phase Noise Reduction in a VHF MEMS-CMOS Oscillator Using Phononic Crystals
IEEE Journal of the Electron Devices Society, 2016 This paper presents experimental results showing reduced phase noise in a very high frequency band microelectromechanical systems (MEMS) oscillator. This has been achieved by engineering the embedded MEMS resonator with phononic crystal structures.
Pei Qin +3 more
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A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array [PDF]
Microsystems & NanoengineeringThis paper presents a highly sensitive CMOS-MEMS system-on-chip (SoC) for multiparameter sensing, achieved through the monolithic integration of a capacitive microcantilever array with on-chip signal processing circuitry.
Feiyun Wang +4 more
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A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging. [PDF]
Micromachines (Basel), 2023 Mendicino R, Dalla Betta GF.
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