Results 31 to 40 of about 7,213 (255)
CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor
Micro and Nano Systems Letters, 2021 LC CMOS voltage-controlled oscillators (VCOs) with tunable inductors are essential for high-performance, multi-band communication systems, such as IoT applications and 5G communication.
Uikyu Chae +4 more
doaj +1 more source
CMOS-MEMS Vibro-Impact Devices and Applications
Frontiers in Mechanical Engineering, 2022 CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics have been shown to yield unique and unprecedented functionalities with on-chip integration capability.
Chun-Pu Tsai, Wei-Chang Li
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Manufacturing Issues of BEOL CMOS-MEMS Devices
IEEE Access, 2021 In this paper we present a comprehensive report on the issues found during the manufacturing of high-yield CMOS-MEMS sensors based on vapor-phase hydrogen fluoride (vapor- $HF$ ) oxide etching.
Juan Valle +3 more
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Porous Alumina Based Capacitive MEMS RH Sensor [PDF]
, 2008 The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity (RH) sensor that can be incorporated into a state-of-the-art, wireless ...
Desmulliez, Marc +4 more
core +4 more sources
Monolithic ultrasound fingerprint sensor. [PDF]
, 2017 This paper presents a 591×438-DPI ultrasonic fingerprint sensor. The sensor is based on a piezoelectric micromachined ultrasonic transducer (PMUT) array that is bonded at wafer-level to complementary metal oxide semiconductor (CMOS) signal processing ...
Boser, Bernhard E +7 more
core +1 more source
Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing. [PDF]
, 2013 This paper is intended to describe the design and manufacturing aspects of a simple micromachined capacitive pressure sensor working in the pressure range of 0-1000 mbar. 500 µm thick Borofloat® 33 glass and silicon wafers were used as substrates.
Csikósné Pap, Andrea Edit +2 more
core +2 more sources
A comprehensive high-level model for CMOS-MEMS resonators [PDF]
, 2018 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new ...
Banerji, Saoni +2 more
core +2 more sources
SI-based unreleased hybrid MEMS-CMOS resonators in 32nm technology [PDF]
, 2012 This work presents the first unreleased Silicon resonators fabricated at the transistor level of a standard CMOS process, and realized without any release steps or packaging.
Marathe, Radhika A. +2 more
core +2 more sources
Characterization of an embedded RF-MEMS switch [PDF]
, 2010 An RF-MEMS capacitive switch for mm-wave integrated circuits, embedded in the BEOL of 0.25μm BiCMOS process, has been characterized. First, a mechanical model based on Finite-Element-Method (FEM) was developed by taking the residual stress of the thin ...
Ehwald, K. E. +10 more
core +1 more source
Frontiers in Mechanical Engineering, 2022 MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
doaj +1 more source