Design, fabrication and characterization of monolithic embedded parylene microchannels in silicon substrate [PDF]
, 2006 This paper presents a novel channel fabrication technology of bulk-micromachined monolithic embedded polymer channels in silicon substrate. The fabrication process favorably obviates the need for sacrifical materials in surface-micromachined channels and
Chen, Po-Jui +2 more
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Monolithic High-Aspect-Ratio Embedded Parylene Channel Technology: Fabrication, Integration, and Applications [PDF]
, 2006 This paper presents a novel channel fabrication technology of monolithic bulk-micromachined embedded channels. Based upon implementing two-step complementary dry etching technique and conformal parylene C layer deposition, high-aspect-ratio (internal
Chen, Po-Jui, Tai, Yu-Chong
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Thermal profiles within the channel of planar gunn diodes using micro-particle sensors [PDF]
, 2017 The paper describes the use of a novel microparticle sensor (~3 μm diameter) and infra-red (IR) microscopy to measure the temperature profile within the active channel (typically 3 μm length and 120 μm width) of planar Gunn diodes. The method has enabled
Bajo, Miguel Montes +6 more
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A Monolithically Fabricated Combinatorial Mixer for Microchip-Based High-Throughput Cell Culturing Assays [PDF]
, 2007 We present an integrated method to fabricate 3- D microfluidic networks and fabricated the first on-chip cell culture device with an integrated combinatorial mixer.
Ho, Dean, Liu, Mike C., Tai, Yu-Chong
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Characterization of CMOS-MEMS Resonant Pressure Sensors [PDF]
IEEE Sensors Journal, 2017 IEEE Comprehensive characterization results of a CMOS-MEMS resonant pressure sensor are presented. We have extensively evaluated the key performance parameters of our device in terms of quality factor (Q) variations under variable conditions of temperature and pressure, characterized by Knudsen number (Kn).
Banerji, Saoni +2 more
openaire +3 more sources
A Test Setup for the Characterization of Lorentz-Force MEMS Magnetometers
IEEE Open Journal of Circuits and Systems, 2021 Lorentz-force MEMS magnetometers are interesting candidates for the replacement of magnetometers in consumer electronics products. Plenty of works in the literature propose MEMS magnetometers, their readout circuits and modulations.
Josep Maria Sanchez-Chiva +3 more
doaj +1 more source
Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip [PDF]
, 2014 A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented.
Dai, Ching-Liang +2 more
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On the integration of ultrananocrystalline diamond (UNCD) with CMOS chip
AIP Advances, 2017 A low temperature deposition of high quality ultrananocrystalline diamond (UNCD) film onto a finished Si-based CMOS chip was performed to investigate the compatibility of the UNCD deposition process with CMOS devices for monolithic integration of MEMS on
Hongyi Mi +8 more
doaj +1 more source
Floating-disk parylene micro check valve [PDF]
, 2007 A novel micro check valve which has nearly ideal fluidic shunting behaviors is presented. Featuring a parylene-based floating disk, this surface-micromachined check valve ultimately realizes both zero forward cracking pressure and zero reverse ...
Chen, Po-Jui, Tai, Yu-Chong
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Circuit modeling of a MEMS varactor including dielectric charging dynamics [PDF]
, 2016 Electrical models for MEMS varactors including the effect of dielectric charging dynamics are not available in commercial circuit simulators. In this paper a circuit model using lumped ideal elements available in the Cadence libraries and a basic Verilog-
Andrade Miceli, Dennis +5 more
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