Results 61 to 70 of about 7,213 (255)
Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone
Scientific Reports, 2022 We present a miniaturised thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical ...
Richard Hopper +4 more
doaj +1 more source
A Colloidal Quantum Dot Thermistor and Bolometer
Advanced Materials, EarlyView.This work introduces colloidal quantum dot thermistors employing a potential barrier structure to tune the activation energy of transport and hence the temperature coefficient of resistance (TCR). Upon integration with plasmonic absorbers, the CQD‐based bolometer device enables room‐temperature wavelength‐selective photodetection across the mid‐ to ...
Gaurav Kumar +7 more
wiley +1 more source
A Monolithic Three-Axis Accelerometer with Wafer-Level Package by CMOS MEMS Process
Proceedings, 2017 This paper presents a monolithic three-axis accelerometer with wafer-level package by CMOS MEMS process. The compositions of the microstructure are selected from CMOS layers in order to suppress the in-plane and out-of-plane bending deflection caused by ...
S. H. Tseng +6 more
doaj +1 more source
A Nanoscale Parametric Feedback Oscillator [PDF]
, 2011 We describe and demonstrate a new oscillator topology, the parametric feedback oscillator (PFO). The PFO paradigm is applicable to a wide variety of nanoscale devices and opens the possibility of new classes of oscillators employing innovative frequency ...
Cross, Michael C. +5 more
core +3 more sources
2D Nanomaterials Toward Function‐Ready Superlubricity in Advanced Microsystems
Advanced Materials, EarlyView.A unified framework links structural and transformation superlubricity with microsystem functions and deployment requirements. Mechanisms, device architectures, integration strategies, AI‐guided discovery, and benchmarking protocols are connected to define function‐ready superlubricity in advanced microsystems.
Yushan Geng, Jun Yang, Yong Yang
wiley +1 more source
Etching technique of high aspect ratio silicon trenches based on CMOS-MEMS process
Dianzi Jishu Yingyong, 2018 Etching technique of deep silicon trenches with high aspect ratio is critical in improving integration and accuracy of Micro-Electro-Mechanical Systems(MEMS)sensor array and reducing the cost of it.
Zhang Haihua, Lv Yufei, Lu Zhongxuan
doaj +1 more source
Design and simulation of a multi-function MEMS sensor for health and usage monitoring. [PDF]
, 2010 Health and usage monitoring as a technique for online test, diagnosis or prognosis of structures and systems has evolved as a key technology for future critical systems.
Begbie, Mark +4 more
core +1 more source
Advanced Materials Technologies, EarlyView.This review explores advances in wearable and lab‐on‐chip technologies for breast cancer detection. Covering tactile, thermal, ultrasound, microwave, electrical impedance tomography, electrochemical, microelectromechanical, and optical systems, it highlights innovations in flexible electronics, nanomaterials, and machine learning.
Neshika Wijewardhane +4 more
wiley +1 more source
Manufacture of Radio Frequency Micromachined Switches with Annealing [PDF]
, 2014 The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs.
Dai, Ching-Liang, Lin, Cheng-Yang
core +2 more sources
Advanced Materials Technologies, EarlyView.Transducers convert physical signals into electrical and optical representations, yet each mechanism is bounded by intrinsic trade‐offs across bandwidth, sensitivity, speed, and energy. This review maps transduction mechanisms across physical scale and frequency, showing how heterogeneous integration and multiphysics co‐design transform isolated ...
Aolei Xu +8 more
wiley +1 more source