Results 81 to 90 of about 227,472 (115)
Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing. [PDF]
, 2013 This paper is intended to describe the design and manufacturing aspects of a simple micromachined capacitive pressure sensor working in the pressure range of 0-1000 mbar. 500 µm thick Borofloat® 33 glass and silicon wafers were used as substrates.
Kulinyi, Sándor +3 more
core +1 more source
A High-Temperature, Low-Noise Readout ASIC for MEMS-Based Accelerometers
Sensors, 2019 This paper presents the development and measurement results of a complementary metal oxide semiconductor (CMOS) readout application-specific integrated circuit (ASIC) for bulk-silicon microelectromechanical system (MEMS) accelerometers. The proposed ASIC
Min Qi, An-qiang Guo, Dong-hai Qiao
doaj +1 more source
Small Methods, Volume 10, Issue 19, 7 October 2026.For the observation of micromechanical devices, a fast imaging technique with high temporal resolution is needed. Here, we demonstrate that a standard scanning electron microscope can be converted into a time‐resolving instrument using a fast detector and a time‐to‐digital converter.
Joel Rehmann +4 more
wiley +1 more source
Dynamic Control of Phase Matching in Nonlinear Metasurfaces Using Pancharatnam–Berry Phase
Nanophotonics, Volume 15, Issue 17, 11 September 2026.Can mechanical rotation of a metasurface control the phase of a nonlinear optical signal? In a dual‐metasurface multipass cell, a circularly polarized pump interacts repeatedly with two plasmonic metasurfaces between two mirrors. By exploiting the geometric phase, rotating one metasurface shifts the phase‐matching condition of the second‐harmonic ...
Madona Mekhael +4 more
wiley +1 more source
Silicon Photonic Beam Steerer Based on Metalens Focal Plane Array
Nanophotonics, Volume 15, Issue 17, 11 September 2026.A silicon photonic beam steerer based on a metalens focal plane array (FPA) monolithically integrates the collimation lens on‐chip while enabling blind‐spot‐free continuous beam steering. Thermo‐optic prisms provide continuous fine‐tuning and more than double the number of resolvable points.
Chung‐Yu Hsu +9 more
wiley +1 more source
Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices
MicromachinesComplementary Metal Oxide Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) devices play significant roles in emerging research fields such as artificial intelligence (AI) [...]
Zhiming Chen
doaj +1 more source
Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme
Micromachines, 2018 A monolithic low noise and low zero-g offset CMOS/MEMS accelerometer and readout scheme in standard 0.18 μm CMOS mixed signal UMC process is presented. The low noise chopper architecture and telescopic topology is developed to achieve low noise. The
Yu-Sian Liu, Kuei-Ann Wen
doaj +1 more source
A comprehensive high-level model for CMOS-MEMS resonators [PDF]
, 2018 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new ...
Madrenas Boadas, Jordi +5 more
core +1 more source
High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer
Micromachines, 2018 In this paper, a seesaw torsional relay monolithically integrated in a standard 0.35 μm complementary metal oxide semiconductor (CMOS) technology is presented.
Martín Riverola +3 more
doaj +1 more source
SI-based unreleased hybrid MEMS-CMOS resonators in 32nm technology [PDF]
, 2012 This work presents the first unreleased Silicon resonators fabricated at the transistor level of a standard CMOS process, and realized without any release steps or packaging.
Radhika Marathe +5 more
core +1 more source