CMOS MEMS Fabrication Technologies and Devices [PDF]
Micromachines, 2016 This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators.
Hongwei Qu
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A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization [PDF]
Micromachines, 2021 CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical ...
Sebastià A. Bota +2 more
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Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators [PDF]
Sensors, 2018 We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level.
Sebastià A. Bota +2 more
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Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis [PDF]
Microsystems & Nanoengineering, 2023 Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology applications. For such a direct CMOS-
Avisek Roy +3 more
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Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers [PDF]
Microsystems & Nanoengineering, 2022 This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes.
J. J. Valle +3 more
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Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide [PDF]
Sensors, 2020 In this research, a new application of reduced graphene oxide (rGO) for a complementary metal-oxide-semiconductor (CMOS)-MEMS infrared (IR) sensor and emitter is proposed.
Shu-Jung Chen, Bin Chen
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CMOS MEMS Design and Fabrication Platform
Frontiers in Mechanical Engineering, 2022 This article mainly describes the technology related to the CMOS MEMS process platform provided by the Taiwan Semiconductor Research Institute (TSRI), including the process flow, design verification, back-end dicing, and packaging of the CMOS MEMS ...
Sheng-Hsiang Tseng
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Capacitive Sensors and Actuators by CMOS MEMS Foundry [PDF]
MicromachinesThis article introduces the current status of the 0.18-micron CMOS MEMS foundry service platform provided by the Taiwan Semiconductor Research Institute (TSRI), extensively covering the CMOS MEMS components that it has supported in development and ...
Lung-Jieh Yang +5 more
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Implementation of a CMOS/MEMS Accelerometer with ASIC Processes [PDF]
Micromachines, 2019 This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using
Yu-Sian Liu, Kuei-Ann Wen
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CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor
Micro and Nano Systems Letters, 2021 LC CMOS voltage-controlled oscillators (VCOs) with tunable inductors are essential for high-performance, multi-band communication systems, such as IoT applications and 5G communication.
Jeong-Geun Kim, Il-Joo Cho, Hyun-Yong Yu
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