Results 41 to 50 of about 6,180 (208)
CMOS-MEMS for RF and Physical Sensing Applications
, 2022 With the emergence of 5G/mm-Wave communication, there is a growing need for novel front-end electromechanical devices in filtering and carrier generation applications.
Udit Rawat (13834036)
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Frontiers in Mechanical Engineering, 2022 MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
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A Review of silicon carbide development in MEMS applications [PDF]
, 2009 Due to its desirable material properties, Silicon Carbide (SiC) hasbecome an alternative material to replace Si for MicroelectromechanicalSystems (MEMS) applications in harsh environments.
Cheung, R. +3 more
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A Test Setup for the Characterization of Lorentz-Force MEMS Magnetometers
IEEE Open Journal of Circuits and Systems, 2021 Lorentz-force MEMS magnetometers are interesting candidates for the replacement of magnetometers in consumer electronics products. Plenty of works in the literature propose MEMS magnetometers, their readout circuits and modulations.
Josep Maria Sanchez-Chiva +3 more
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SOI CMOS MEMS infra-red thermal source with carbon nanotubes coating [PDF]
, 2014 This abstract presents the development of a Silicon-on-Insulator (SOI) CMOS micro-electro-mechanical (MEMS) micro-hotplate based infra-red (IR) light source employing a vertically aligned multi-walled carbon nanotubes (VA- MWCNTs) emission layer.
Cole, M.T. +16 more
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A CMOS MEMS Pressure Sensor for Blood Pulse and Pressure Measurement Applications
, 2022 A CMOS MEMS pressure sensor for blood pulse and pressure measurement applications is proposed. A capacitive MEMS sensor implemented in UMC 0.18 μm CMOS MEMS process is adopted to sense blood pulses and pressure.
Shih, Horng-Yuan;Hsin, Chin-Te;Yang, Cheng-Wei;Chen, Hsin-Liang;Kuo, Jhe-Yuan
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Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor
, 2023 The complementary metal-oxide-semiconductor (CMOS) process is the main stream to fabricate integrated circuits (ICs) in the semiconductor industry. Microelectromechanical systems (MEMS), when combined with CMOS electronics to form the CMOS MEMS process ...
Yang, Lung-Jieh;Waikhom, Reshmi;Shih, Horng-Yuan;Lee, Yi-Kuen
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On the integration of ultrananocrystalline diamond (UNCD) with CMOS chip
AIP Advances, 2017 A low temperature deposition of high quality ultrananocrystalline diamond (UNCD) film onto a finished Si-based CMOS chip was performed to investigate the compatibility of the UNCD deposition process with CMOS devices for monolithic integration of MEMS on
Hongyi Mi +8 more
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Phase Noise Reduction in a VHF MEMS-CMOS Oscillator Using Phononic Crystals
IEEE Journal of the Electron Devices Society, 2016 This paper presents experimental results showing reduced phase noise in a very high frequency band microelectromechanical systems (MEMS) oscillator. This has been achieved by engineering the embedded MEMS resonator with phononic crystal structures.
Pei Qin +3 more
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The Fringe-Capacitance of Etching Holes for CMOS-MEMS [PDF]
Micromachines, 2015 Movable suspended microstructures are the common feature of sensors or devices in the fields of Complementary-Metal-Oxide-Semiconductors and Micro-Electro-Mechanical Systems which are usually abbreviated as CMOS-MEMS. To suspend the microstructures, it is commonly to etch the sacrificial layer under the microstructure layer.
Yi-Ta Wang +3 more
openaire +2 more sources