Results 51 to 60 of about 6,180 (208)
Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing. [PDF]
, 2013 This paper is intended to describe the design and manufacturing aspects of a simple micromachined capacitive pressure sensor working in the pressure range of 0-1000 mbar. 500 µm thick Borofloat® 33 glass and silicon wafers were used as substrates.
Kulinyi, Sándor +3 more
core +1 more source
Pulsed Digital Oscillators for Electrostatic MEMS
, 2012 This paper introduces a new actuation scheme for implementing Pulsed Digital Oscillators (PDOs) for electrostatic MEMS resonators. In this scheme, the capacitance of the device is biased with a voltage and it is periodically sampled. Short pulses of zero
Pons Nin, Joan +15 more
core +1 more source
Low-Cost Microbolometer Type Infrared Detectors
Micromachines, 2020 The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications.
Le Yu +5 more
doaj +1 more source
Frontiers in Mechanical Engineering, 2022 Environmental sensing units such as gas sensors, humidity sensors, pressure sensors, PM 2.5 sensors, or temperature sensors are widely used in our daily lives. In this study, CMOS-MEMS technology is exploited to fabricate and monolithically integrate the
Ya-Chu Lee +5 more
doaj +1 more source
Characterization of CMOS-MEMS Resonant Pressure Sensors [PDF]
IEEE Sensors Journal, 2017 IEEE Comprehensive characterization results of a CMOS-MEMS resonant pressure sensor are presented. We have extensively evaluated the key performance parameters of our device in terms of quality factor (Q) variations under variable conditions of temperature and pressure, characterized by Knudsen number (Kn).
Banerji, Saoni +2 more
openaire +3 more sources
Advanced Functional Materials, EarlyView.Thermally oxidized MoS2‐based radio‐frequency switches enable a multifunctional platform that unifies broadband RF switching and in‐memory computation. The device achieves a cutoff frequency of 33.2 THz with high energy efficiency and supports hardware‐aware signal processing.
Juho Son +5 more
wiley +1 more source
Capacitive Sensors and Actuators by CMOS MEMS Foundry
MicromachinesThis article introduces the current status of the 0.18-micron CMOS MEMS foundry service platform provided by the Taiwan Semiconductor Research Institute (TSRI), extensively covering the CMOS MEMS components that it has supported in development and ...
Lung-Jieh Yang +5 more
doaj +1 more source
Weaving Intelligence: Thermally Drawn Multimaterial Fibers Toward AI‐Enabled Smart Textiles
Advanced Materials, EarlyView.Thermally drawn multimaterial fibers are rapidly advancing as intelligent structural units for next‐generation smart textiles. Integrating multimaterial architectures with neuromorphic and spiking‐neural‐network principles enables fabrics that can sense, compute, and adapt autonomously.
Vuong Dinh Trung +9 more
wiley +1 more source
Advanced Materials Technologies, EarlyView.This review explores advances in wearable and lab‐on‐chip technologies for breast cancer detection. Covering tactile, thermal, ultrasound, microwave, electrical impedance tomography, electrochemical, microelectromechanical, and optical systems, it highlights innovations in flexible electronics, nanomaterials, and machine learning.
Neshika Wijewardhane +4 more
wiley +1 more source
CMOS-MEMS Probe Arrays for Tip-Based Nanofabrication
, 2018 Scanning probe microscopy (SPM) tip-based nanofabrication (TBN) is a technique that directly creates a variety of nanostructures on a substrate using the nanoscale probe tips.
Yang Zhang (5463086)
core +1 more source