Results 71 to 80 of about 6,180 (208)

Unconventional Room‐Temperature Antisymmetric Magnetoresistance in van der Waals Fe3GaTe2/Pt Heterostructures

open access: yesAdvanced Science, EarlyView.
We investigated a special electrical phenomenon, known as antisymmetric magnetoresistance with four distinct resistance states, in 2D Fe3GaTe2/Pt devices at room temperature. By designing devices with two separated magnetic nanoflakes, we confirmed that the effect originates from spin–momentum locking rather than magnetic domain walls or interface ...
Yunwen Zhu   +10 more
wiley   +1 more source

Test support strategies for MEMS [PDF]

open access: yes, 1999
Integrated test technology is becoming critically important for MEMS due to the high reliability and safety critical applications targeted. High quality levels in production require efficient test strategies that are properly validated.
A. Dorey   +7 more
core  

SI-based unreleased hybrid MEMS-CMOS resonators in 32nm technology [PDF]

open access: yes, 2012
This work presents the first unreleased Silicon resonators fabricated at the transistor level of a standard CMOS process, and realized without any release steps or packaging.
Radhika Marathe   +5 more
core   +1 more source

Etching technique of high aspect ratio silicon trenches based on CMOS-MEMS process

open access: yesDianzi Jishu Yingyong, 2018
Etching technique of deep silicon trenches with high aspect ratio is critical in improving integration and accuracy of Micro-Electro-Mechanical Systems(MEMS)sensor array and reducing the cost of it.
Zhang Haihua, Lv Yufei, Lu Zhongxuan
doaj   +1 more source

A Surface Micromachined CMOS MEMS Humidity Sensor [PDF]

open access: yesMicromachines, 2015
This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor.
Jian-Qiu Huang   +3 more
openaire   +2 more sources

Analog Weight Update Rule in Ferroelectric Hafnia, Using picoJoule Programming Pulses

open access: yesAdvanced Electronic Materials, EarlyView.
Resistive, ferroelectric synaptic weights based on BEOL‐compatible hafnia/zirconia nanolaminates are fabricated. Lateral downscaling the devices below 10 µm2 enables 20 ns programming with electrical pulses, dissipating ≤ 3 pJ. Experimental results show that final conductance state is set by pulse amplitude, and is largely independent of the initial ...
Alexandre Baigol   +7 more
wiley   +1 more source

Monolithic integration for photonic applications: MEMS on CMOS and functional BSOI

open access: yes, 2022
Due to exploding use of sensors and actuators in mobile and industrial applications smaller systems combined with low power consumption and higher versatility are required.
Kaden, Christiane, Schulze, Matthias
core  

Suitability of MEMS accelerometers for condition monitoring: An experimental study [PDF]

open access: yes, 2008
With increasing demands for wireless sensing nodes for assets control and condition monitoring; needs for alternatives to expensive conventional accelerometers in vibration measurements have been arisen.
Samir Mekid   +7 more
core   +1 more source

Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology

open access: yesProceedings, 2018
This study implements the metal-oxide-semiconductor (MOS) type gas sensor using the TSMC 0.35 μm 2P4M process. The gas concentration is detected based on the resistance change measured by the proposed sensor.
Ya-Chu Lee   +3 more
doaj   +1 more source

Cavity Microelectrode Arrays for Electrical Recordings From Neurons

open access: yesAdvanced Electronic Materials, EarlyView.
Microelectrode arrays (MEAs) are used to study electrophysiological activity. However, their signals are small with high noise. By adding a 100‐nanometer‐high cavity above the electrode, which reduces impedance without affecting resolution, we improve signal quality.
Johannes Lewen   +2 more
wiley   +1 more source

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