Results 91 to 100 of about 229,926 (147)

A comprehensive high-level model for CMOS-MEMS resonators [PDF]

, 2018
2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new ...
Madrenas Boadas, Jordi, Jordi Madrenas, Banerji, Saoni, Fernández, Daniel, Saoni Banerji, Daniel Fernandez   +5 more
core   +1 more source

A Smart Active Phase-Change Micropump Based on CMOS-MEMS Technology. [PDF]

Sensors (Basel), 2023
Jin W, Guan Y, Wang Q, Huang P, Zhou Q, Wang K, Liu D.   +6 more
europepmc   +1 more source

SI-based unreleased hybrid MEMS-CMOS resonators in 32nm technology [PDF]

, 2012
This work presents the first unreleased Silicon resonators fabricated at the transistor level of a standard CMOS process, and realized without any release steps or packaging.
Radhika Marathe, Weinstein, Dana, Wentao Wang, Marathe, Radhika A., Dana Weinstein, Wang, Wentao   +5 more
core   +1 more source

Comprehensive Die Shear Test of Silicon Packages Bonded by Thermocompression of Al Layers with Thin Sn Capping or Insertions

Micromachines, 2018
Thermocompression bonding for wafer-level hermetic packaging was demonstrated at the lowest temperature of 370 to 390 °C ever reported using Al films with thin Sn capping or insertions as bonding layer.
Shiro Satoh, Hideyuki Fukushi, Masayoshi Esashi, Shuji Tanaka   +3 more
doaj   +1 more source

A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging. [PDF]

Micromachines (Basel), 2023
Mendicino R, Dalla Betta GF.
europepmc   +1 more source

Thermoelectric Energy Micro Harvesters with Temperature Sensors Manufactured Utilizing the CMOS-MEMS Technique. [PDF]

Micromachines (Basel), 2022
Shen YX, Tsai YC, Lee CY, Wu CC, Dai CL.
europepmc   +1 more source

Multiphysics Optical–Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber

Sensors
Infrared (IR) thermal sensors on CMOS-SOI-MEMS platforms enable scalable, low-cost thermal imaging but require optimized optical, thermal, and mechanical performance.
Moshe Avraham, Yael Nemirovsky
doaj   +1 more source

A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing. [PDF]

Sci Rep, 2021
Popa D, Hopper R, Ali SZ, Cole MT, Fan Y, Veigang-Radulescu VP, Chikkaraddy R, Nallala J, Xing Y, Alexander-Webber J, Hofmann S, De Luca A, Gardner JW, Udrea F.   +13 more
europepmc   +1 more source

Design Considerations of an Analog Voltage Mode Readout Circuit for the CMOS-SOI-MEMS Gas Sensor Dubbed GMOS

Micromachines
Modern gas sensor technology is becoming an important part of our lives. Hence, there has been considerable effort over the past 25 years towards the goal of creating low-cost gas sensors by employing modern microelectronics technology to manufacture ...
Efraim-Lavi Bukshish, Sharon Bar-Lev, Tanya Blank, Yael Nemirovsky   +3 more
doaj   +1 more source

A CMOS-MEMS RF-tunable bandpass filter based on two high-Q 22-MHz polysilicon clamped-clamped beam resonators

, 2009
This letter presents the design, fabrication, and demonstration of a CMOS-MEMS filter based on two high-Q submicrometer-scale clamped-clamped beam resonators with resonance frequency around 22 MHz.
Giner, Joan, Barniol, Núria, López, Joan Lluis, Uranga, Arantxa, Murillo Rodríguez, Gonzalo, Verd, Jaume, Abadal, Gabriel, Torres, Francesc   +7 more
core   +1 more source