CMOS-MEMS Micromechanical Filters
, 2014 本計畫擬以CMOS (complementary metal oxide semiconductor)-MEMS (microelectromechanical systems)技術研製整合讀出電路的微機械式濾波器，適合應用在無線射頻通訊系統。就國內外的發展現況，利用CMOS- MEMS技術，將微機械式濾波器與電路整合製作在單一晶片上，是一種新的技術，相關的技術產品，尚未被商品化。本計畫將發展高品質因子和低驅動電壓的微機械式濾波器。主要的創新性，包括(1)利用商業化CMOS製程製作機械式微濾波器；(2 ...
戴慶良
core
Design and Implementation of a CMOS-MEMS Out-of-Plane Detection Gyroscope. [PDF]
Micromachines (Basel)Tian H, Zhang Z, Liu L, Wei W, Cao H.
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Analysis and Simulation of Forcing the Limits of Thermal Sensing for Microbolometers in CMOS-MEMS Technology. [PDF]
Micromachines (Basel), 2019 Göktaş H, Gökhan FS.
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The Role of Pd-Pt Bimetallic Catalysts in Ethylene Detection by CMOS-MEMS Gas Sensor Dubbed GMOS. [PDF]
Micromachines (Basel)Ashkar H +3 more
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Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices. [PDF]
Micromachines (Basel), 2019 Verd J, Segura J.
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Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS⁻MEMS Technology. [PDF]
Micromachines (Basel), 2019 Göktaş H.
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Using MEMS Capacitive Switches in Tunable RF Amplifiers
EURASIP Journal on Wireless Communications and Networking, 2006 A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations.
doaj
Optimization of a Piezoelectric Energy Harvester and Design of a Charge Pump Converter for CMOS-MEMS Monolithic Integration. [PDF]
Sensors (Basel), 2019 Duque M +4 more
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CMOS BEOL 호환 가능한 MEMS 메모리 및 CMOS-MEMS Hybrid Circuit 개발
학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2024.2,[viii, 29 p. :]As CMOS device continues to scale down, leakage current is one of the significant challenges. Unlike CMOS devices, MEMS switch shows low power characteristics with mechanical movement. By designing low
Lee, Seung-Jun, 이승준
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Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process. [PDF]
Sci Rep, 2018 Cai C, Tan J, Hua D, Qin M, Zhu N.
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