DESIGN OF SMART SENSORS FOR DETECTION OF PHYSICAL QUANTITIES [PDF]
, 2010 Microsystems and integrated smart sensors represent a flourishing business thanks to the manifold benefits of these devices with respect to their respective macroscopic counterparts.
DEI, MICHELE
core
Design and fabrication of RF MEMS switch by CMOS process
, 2011 This work investigates the fabrication of a RF (ratio frequency) MEMS (micro elector mechanical system) switch using the standard 0.35 μm 2P4M (double polysilicon four metal) CMOS (complementary metal oxide semiconductor) process and the post-process ...
Wu, C.C.
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A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology. [PDF]
Sensors (Basel), 2020 Chen CF, Shen CH, Yeh YY.
europepmc +1 more source
Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS-MEMS Technique. [PDF]
Micromachines (Basel), 2020 Shen WC +4 more
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A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation. [PDF]
Sensors (Basel), 2020 Sánchez-Chiva JM +3 more
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A micromachined zipping variable capacitor
, 2010 Micro-electro-mechanical systems (MEMS) have become ubiquitous in recent years and are found in a wide range of consumer products. At present, MEMS technology for radio-frequency (RF) applications is maturing steadily, and significant improvements have ...
Pu, Suan-Hui
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A CMOS MEMS-based Membrane-Bridge Nanomechanical Sensor for Small Molecule Detection. [PDF]
Sci Rep, 2020 Yen YK, Chiu CY.
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Portable Real-Time Detection of Pb(II) Using a CMOS MEMS-Based Nanomechanical Sensing Array Modified with PEDOT:PSS. [PDF]
Nanomaterials (Basel), 2020 Yen YK, Lai CY.
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CMOS-MEMS Z-Axis Magnetic Field Sensor with an Additional Collector. [PDF]
Micromachines (Basel)Dai ZX, Tsai RW, Shih QH, Hsu CC.
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Design, Simulation, and Experimental Characterization of a Superimposed Top- and Bottom-Gate Field-Emission Triode Fabricated Using a Post-CMOS MEMS Process. [PDF]
Micromachines (Basel)Wu YH, Chen YT, Chang TW, Chang WT.
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