Results 61 to 70 of about 229,926 (147)

Design and analysis of piezoelectric MEMS micro‐speaker based on scandium‐doped AlN thin film

Micro & Nano Letters, 2021
Piezoelectric MEMS microspeakers are promising candidates for miniaturized speakers, such as for in‐ear applications. Using lead‐free scandium doped aluminium nitride (ScAlN) thin film instead of lead zirconium titanate helps these speakers to be ...
Ahmed Fawzy, Yiming Lang, Menglun Zhang
doaj   +1 more source

Transport–Reaction–Signal Coupling in Lateral Flow Assays for Next‐Generation Point‐of‐Care Diagnostics

Advanced Science, EarlyView.
Lateral flow assays are evolving into interdisciplinary, system‐level sensing platforms. Recent innovations are deconstructed through coupled phases of mass transfer, reaction, and signal transduction, revealing interdependence across porous materials, interfacial chemistry, nanolabels, readout devices, and data‐enabled analysis.
Yan Pan, Yuewei Li, Chao Mi, Zhengwen Yang, Lana McClements, Steven J. Langford, Jiayan Liao   +6 more
wiley   +1 more source

Zero-level packaging of MEMS in standard CMOS technology

, 2010
A novel technique for global packaging of MEMS devices using standard CMOS technology is presented. A MEMS polysilicon resonator is fabricated and on-chip packaged using two metal layers already available from the CMOS technology.
Torres, Francisco, Giner, Joan Josep, Marigó, Eloi, Barniol, Núria, Murillo Rodríguez, Gonzalo, Uranga, Arantxa, Lopez, Joan Lluis, Esteve, Jaume, Abadal, Gabriel   +8 more
core   +1 more source

SOI CMOS MEMS infra-red thermal source with carbon nanotubes coating [PDF]

, 2014
This abstract presents the development of a Silicon-on-Insulator (SOI) CMOS micro-electro-mechanical (MEMS) micro-hotplate based infra-red (IR) light source employing a vertically aligned multi-walled carbon nanotubes (VA- MWCNTs) emission layer.
Cole, M.T., De Luca, A, Cole, Matthew, Cole, Matthew T., Udrea, F., Ali, Syed Z., Hopper, R.H., Milne, W.I., Ali, S.Z., Milne, W I, Milne, W. I., De Luca, A., Gardner, J. W., Gardner, J.W., Ali, S. Z., Udrea, Florin, Hopper, R. H.   +16 more
core   +1 more source

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

, 2023
The complementary metal-oxide-semiconductor (CMOS) process is the main stream to fabricate integrated circuits (ICs) in the semiconductor industry. Microelectromechanical systems (MEMS), when combined with CMOS electronics to form the CMOS MEMS process ...
Yang, Lung-Jieh;Waikhom, Reshmi;Shih, Horng-Yuan;Lee, Yi-Kuen
core   +1 more source

Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone

Proceedings, 2020
In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the ...
Richard Hopper, Daniel Popa, Vasileios Tsoutsouras, Florin Udrea, Phillip Stanley-Marbell   +4 more
doaj   +1 more source

AI‐Assisted Ultrasensitive Biosensing using Metal‐Electrolyte‐Metal‐Insulator‐Silicon Structure Based on Oxygen‐Tunable Iridium Oxide Nanonets for Lysyl‐Oxidase‐Like‐2 Breast Cancer Detection

Advanced Electronic Materials, EarlyView.
An oxygen‐controlled iridium‐oxide (IrOx) nano‐net structure is developed to enhance the sensitivity of metal‐electrolyte‐metal‐insulator‐silicon (MEMIS) biosensors. Integrated with a deep learning model, this platform achieves a high accuracy of 94.8% for detecting the breast cancer biomarker LOXL2.
Chiao‐Fan Chiu, Pankaj Kumar, Long Nguyen Minh Le, Ping‐Hsuan Wu, Punnatorn Boonyoung, Shen Tingyang, Abhijit Aich, Yi‐Pin Chen, Shih‐Yin Huang, Siddheswar Maikap   +9 more
wiley   +1 more source

Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies

, 2009
Integration of electrostatically driven and capacitively transduced MEMS resonators in commercial CMOS technologies is discussed. A figure of merit to study the performance of different structural layers and different technologies is defined.
Giner, Joan Josep, Teva, Jordi L., Barniol, Núria, López, Joan Lluis, Murillo Rodríguez, Gonzalo, Uranga, Arantxa, Torres, Franciscp, Verd, Jaume, Abadal, Gabriel   +8 more
core   +1 more source

Oxygen‐Scavenging‐Driven Interlayer Engineering for Balancing Linearity and Retention in IGZO Synaptic Memristors

Advanced Electronic Materials, EarlyView.
Oxygen‐scavenging‐induced self‐formed interlayers regulate Schottky‐barrier modulation in IGZO memristors, producing a fundamental trade‐off between synaptic update linearity and retention. A preserved AlOx interlayer moderates voltage distribution and enables gradual, nearly linear conductance updates, whereas a soft‐broken SiO2 interlayer provides a ...
Jae Woo Lee, Dong Hyeop Shin, Seung Joo Myoung, Soohong Eo, Wonjung Kim, Seeun Lee, Changwook Kim, Junjong Lee, Yoon Jung Lee, Sung‐Jin Choi, Sungjun Kim, Dae Hwan Kim   +11 more
wiley   +1 more source

Impact of Rapid Thermal Annealing on the Structural and Piezoelectric Properties of AlN Thin Films

Advanced Electronic Materials, EarlyView.
Aluminum nitride (AlN) is a biocompatible piezoelectric material suitable for energy harvesting in MEMS resonators. Through rapid thermal annealing, a threshold for CMOS‐compatible processes is established. AlN improved its crystallinity and enhanced the piezoelectric coefficient by ∼160%. Devices show an improvement in the electromechanical properties
Laura Mazón‐Maldonado, Lucía Nieto Sierra, M. Pilar Villar Castro, Fernando Lloret‐Vieira, Isidoro Ruíz‐García, Des Gibson, Hadi Heidari, Carlos García Núñez   +7 more
wiley   +1 more source