Results 21 to 30 of about 2,691 (120)

Experiments on MEMS Integration in 0.25 μm CMOS Process

Sensors, 2018
In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology.
Jordi Madrenas, Daniel Fernández, Piotr Michalik   +2 more
exaly   +3 more sources

Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing. [PDF]

Sensors (Basel), 2020
Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing.
Perello-Roig R, Verd J, Bota S, Segura J.   +3 more
europepmc   +2 more sources

System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC. [PDF]

Microsyst Nanoeng
We present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor ...
Hong L, Xiao K, Song X, Lin L, Xu W.
europepmc   +2 more sources

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications-Towards the CMOS-MEMS Monolithic Approach. [PDF]

Micromachines (Basel), 2018
The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS)
Liu H, Zhang L, Li KHH, Tan OK.
europepmc   +2 more sources

A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass

Sensors, 2011
This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive
Hongwei Qu
exaly   +3 more sources

A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array. [PDF]

Microsyst Nanoeng
This paper presents a highly sensitive CMOS-MEMS system-on-chip (SoC) for multiparameter sensing, achieved through the monolithic integration of a capacitive microcantilever array with on-chip signal processing circuitry.
Wang F, Ouyang X, Hong L, Song X, Xu W.
europepmc   +2 more sources

High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer. [PDF]

Micromachines (Basel), 2018
In this paper, a seesaw torsional relay monolithically integrated in a standard 0.35 μm complementary metal oxide semiconductor (CMOS) technology is presented.
Riverola M, Torres F, Uranga A, Barniol N.   +3 more
europepmc   +2 more sources

Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme. [PDF]

Micromachines (Basel), 2018
A monolithic low noise and low zero-g offset CMOS/MEMS accelerometer and readout scheme in standard 0.18 μm CMOS mixed signal UMC process is presented. The low noise chopper architecture and telescopic topology is developed to achieve low noise. The
Liu YS, Wen KA.
europepmc   +2 more sources

Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique [PDF]

Micromachines, 2020
Po-Jen Shih, Yao-Chuan Tsai, Ching-Liang Dai   +2 more
exaly   +2 more sources

Multiphysics Optical-Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber. [PDF]

Sensors (Basel)
Infrared (IR) thermal sensors on CMOS-SOI-MEMS platforms enable scalable, low-cost thermal imaging but require optimized optical, thermal, and mechanical performance.
Avraham M, Nemirovsky Y.
europepmc   +2 more sources