Results 21 to 30 of about 229,926 (147)
Single-Die-Level MEMS Post-Processing for Prototyping CMOS-Based Neural Probes Combined with Optical Fibers for Optogenetic Neuromodulation [PDF]
MicromachinesThe integration of complementary metal–oxide–semiconductor (CMOS) and micro-electromechanical systems (MEMSs) technologies for miniaturized biosensor fabrication enables unprecedented spatiotemporal resolution in monitoring the bioelectrical activity of ...
Gabor Orban +6 more
doaj +2 more sources
Design and Applications of Integrated Transducers in Commercial CMOS Technology
Frontiers in Mechanical Engineering, 2022 Monolithic integration of Microelectromechanical Systems (MEMS) directly within CMOS technology offers enhanced functionality for integrated circuits (IC) and the potential improvement of system-level performance for MEMS devices in close proximity to ...
Udit Rawat +2 more
doaj +1 more source
Multi-level and multidisciplinary optimisation of microelectromechanical systems [PDF]
, 2012 A comparative investigation into the role multi-level and multidisciplinary design optimisation can play in the automated design synthesis of microelectromechanical systems (MEMS) is presented.
Farnsworth, Michael
core +7 more sources
CMOS-MEMS Oscillator Architecture and Phase Noise: A Mini-Review
Frontiers in Mechanical Engineering, 2022 Over the past two decades, the advancement in microelectromechanical systems (MEMS) has been making headway in the development of miniaturized mechanical structures with integrated electronics.
Ming-Huang Li
doaj +1 more source
CMOS-MEMS Vibro-Impact Devices and Applications
Frontiers in Mechanical Engineering, 2022 CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics have been shown to yield unique and unprecedented functionalities with on-chip integration capability.
Chun-Pu Tsai, Wei-Chang Li
doaj +1 more source
Fabrication and Characterization of a CMOS-MEMS Humidity Sensor [PDF]
Sensors, 2015 Dennis JO, Ahmed AY, Khir MH.
exaly +2 more sources
Manufacturing Issues of BEOL CMOS-MEMS Devices
IEEE Access, 2021 In this paper we present a comprehensive report on the issues found during the manufacturing of high-yield CMOS-MEMS sensors based on vapor-phase hydrogen fluoride (vapor- $HF$ ) oxide etching.
Juan Valle +3 more
doaj +1 more source
Test support strategies for MEMS [PDF]
, 1999 Integrated test technology is becoming critically important for MEMS due to the high reliability and safety critical applications targeted. High quality levels in production require efficient test strategies that are properly validated.
Rosing, Richard +3 more
core +4 more sources
Frontiers in Mechanical Engineering, 2022 MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
doaj +1 more source
CMOS-MEMS for RF and Physical Sensing Applications
, 2022 With the emergence of 5G/mm-Wave communication, there is a growing need for novel front-end electromechanical devices in filtering and carrier generation applications.
Udit Rawat (13834036)
core +1 more source