Experiments on MEMS Integration in 0.25 μm CMOS Process [PDF]
Sensors, 2018 In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology.
Jordi Madrenas Boadas +2 more
exaly +4 more sources
A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor [PDF]
Micromachines, 2019 This paper presents the design, fabrication, and characterization of an inductive complementary metal oxide semiconductor micro-electromechanical systems (CMOS-MEMS) accelerometer with on-chip digital output based on LC oscillators.
Yi Chiu, Hsuan-Wu Liu, Hao-Chiao Hong
doaj +2 more sources
System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC [PDF]
Microsystems & NanoengineeringWe present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor ...
Linze Hong +4 more
doaj +2 more sources
Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing [PDF]
Sensors, 2020 Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing.
Rafel Perello-Roig +3 more
doaj +2 more sources
Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach [PDF]
Micromachines, 2018 The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS)
Haotian Liu +3 more
doaj +2 more sources
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
Sensors, 2011 This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive
Hongwei Qu
exaly +3 more sources
A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array [PDF]
Microsystems & NanoengineeringThis paper presents a highly sensitive CMOS-MEMS system-on-chip (SoC) for multiparameter sensing, achieved through the monolithic integration of a capacitive microcantilever array with on-chip signal processing circuitry.
Feiyun Wang +4 more
doaj +2 more sources
Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme [PDF]
Micromachines, 2018 A monolithic low noise and low zero-g offset CMOS/MEMS accelerometer and readout scheme in standard 0.18 μm CMOS mixed signal UMC process is presented. The low noise chopper architecture and telescopic topology is developed to achieve low noise. The
Yu-Sian Liu, Kuei-Ann Wen
doaj +2 more sources
High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer [PDF]
Micromachines, 2018 In this paper, a seesaw torsional relay monolithically integrated in a standard 0.35 μm complementary metal oxide semiconductor (CMOS) technology is presented.
Martín Riverola +3 more
doaj +2 more sources
A descriptive model of the current microelectromechanical systems (MEMS) development process [PDF]
, 2009 This paper uses the IDEFØ process modelling technique to present an ‘As-Is' model for the current process of developing generic MEMS devices, this new model is based on information from current practitioners.
Alcock, Jeffrey R. +2 more
core +7 more sources