Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process. [PDF]
Cai C, Tan J, Hua D, Qin M, Zhu N.
europepmc +1 more source
Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film Flow Sensors by Minimizing Membrane Conductive Heat Losses. [PDF]
Mehmood Z, Haneef I, Ali SZ, Udrea F.
europepmc +1 more source
A CMOS-MEMS cantilever sensor for capnometric applications
Asif Mirza +6 more
openaire +2 more sources
Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection. [PDF]
Maruyama S +3 more
europepmc +1 more source
A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure. [PDF]
Huang JQ, Li B, Chen W.
europepmc +1 more source
Ethanol microsensors with a readout circuit manufactured using the CMOS-MEMS technique. [PDF]
Yang MZ, Dai CL.
europepmc +1 more source
An integrated CMOS micro search‑coil magnetometer with on‑chip calibration and a low‑noise amplifier. [PDF]
Tavakkoli H +6 more
europepmc +1 more source
Design and Implementation of a Low-Noise Analog Front-End Circuit for MEMS Capacitive Accelerometers. [PDF]
Gong K, Li J, Wang X, Cao H, Xie H.
europepmc +1 more source
Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique. [PDF]
Fong CF, Dai CL, Wu CC.
europepmc +1 more source

