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Using MEMS Capacitive Switches in Tunable RF Amplifiers
A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations.
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CMOS BEOL 호환 가능한 MEMS 메모리 및 CMOS-MEMS Hybrid Circuit 개발
학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2024.2,[viii, 29 p. :]As CMOS device continues to scale down, leakage current is one of the significant challenges. Unlike CMOS devices, MEMS switch shows low power characteristics with mechanical movement. By designing low
Lee, Seung-Jun, 이승준
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CMOS–MEMS resonators: From devices to applications
Microelectronic Engineering, 2015Nuria Barniol +2 more
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Advanced CMOS–MEMS Resonator Platform
IEEE Electron Device Letters, 2012Cheng Syun Li, Sheng-Shian Li
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A 5.8-GHz VCO with CMOS-compatible MEMS inductors
Sensors and Actuators A: Physical, 2007Michael Lu +2 more
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Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation
IEEE Transactions on Circuits and Systems I: Regular Papers, 2017Nuria Barniol +2 more
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Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems
Sensors, 2007Hidekuni Takao
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