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Monolithic z-axis CMOS MEMS accelerometer
Microelectronic Engineering, 2014Sheng-Hsiang Tseng +2 more
exaly
CMOS-MEMS membrane for audio-frequency acoustic actuation
Sensors and Actuators A: Physical, 2002exaly
Piezoelectric aluminum nitride thin films for CMOS compatible MEMS: Sputter deposition and doping
Critical Reviews in Solid State and Materials SciencesS Sandeep, Rui M R Pinto, K K Nagaraja
exaly