Results 121 to 130 of about 392,135 (196)

A CMOS-MEMS Ultrasensitive Thermometer Using Internal Resonance Iuduced Frequency Combs

IEEE/LEOS International Conference on Optical MEMS, 2023
This work demonstrates a CMOS-MEMS resonant thermometer with a temperature coefficient of frequency (TCF) as high as 59.2× compared to that of a regular resonator-based counterpart using frequency combs in an internal resonating (IR) beam resonator ...
Ting-Yi Chen, Chun-Pu Tsai, Wei-Chang Li
semanticscholar   +1 more source

Bidirectional CMOS-MEMS Airflow Sensor With Sub-mW Power Consumption and High Sensitivity

IEEE transactions on industrial electronics (1982. Print), 2022
This article presents a bidirectional thermoresistive micro calorimetric flow (TMCF) sensor implemented by a 0.18-μm complementary metal–oxide–semiconductor microelectromechanical systems (CMOS-MEMS) technology, while the sensor thickness is thinned to 2.
Wei Xu, Xiaoyi Wang, Zongqin Ke, Yi-Kuen Lee   +3 more
semanticscholar   +1 more source

Generic Temperature Compensation Scheme for CMOS-MEMS Resonators Based on ARC-Beam Derived Electrical Stiffness Frequency Pulling

IEEE/LEOS International Conference on Optical MEMS, 2023
This work demonstrates a generic temperature compensation scheme applicable for nearly all types of resonators in CMOS-MEMS technology without additional process steps.
I-Chieh Hsieh, Hong-Sen Zheng, Chun-Pu Tsai, Ting-Yi Chen, Wei-Chang Li   +4 more
semanticscholar   +1 more source

A Miniaturized CMOS-MEMS Amperometric Gas Sensor for Rapid Ethanol Detection

IEEE Sensors Journal, 2023
This study presents the design and implementation of a chip-scale amperometric ethanol sensor using the standard commercially available complementary metal oxide semiconductor (CMOS) process together with the post-CMOS micromachining processes.
D. Thu, Zong-Han Liu, Ya-Chu Lee, Tzu-Wen Kuo, W. Sung, Yen-Chang Chu, Y. Chueh, W. Fang   +7 more
semanticscholar   +1 more source

1:6 Internal Resonance in CMOS-MEMS Multiple-Stepped CC-Beam Resonators

IEEE/LEOS International Conference on Optical MEMS, 2022
This work demonstrates, for the first time, internal resonance with a ratio as high as 1:6 in micromechanical CC-beam resonators. Particularly, multiple-stepped beams, similar to that used in [1] but with additional segments, of which the specifically ...
Ting-Yi Chen, Chun-Pu Tsai, Wei-Chang Li
semanticscholar   +1 more source

CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, Ventilation, and Air Conditioning Application

IEEE transactions on industrial electronics (1982. Print), 2021
In this article, by using 0.35-μm two-polysilicon four-metal CMOS MEMS technology, a thermoresistive micro calorimetric flow (TMCF) sensor with two packaging designs is systematically investigated: Open-space (O-type) and probe-with-channel (P-type ...
W. Xu, Xiaoyi Wang, Ruijie Wang, .. Izhar, Jingcui Xu, Yi-Kuen Lee   +5 more
semanticscholar   +1 more source

CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs

Journal of Micromechanics and Microengineering, 2021
The booming growth in environmental conditions sensing and monitoring pushes the need of inexpensive environment sensors with small size and low power consumption.
Ya-Chu Lee, Meng-Lin Hsieh, Pen-Sheng Lin, Chia-Hung Yang, Sheng-Kai Yeh, Thi Thu Do, W. Fang   +6 more
semanticscholar   +1 more source

A Wafer-Level Packaged CMOS MEMS Pirani Vacuum Gauge

IEEE Transactions on Electron Devices, 2021
In this article, we report a wafer-level packaged Pirani vacuum gauge using the proprietary InvenSense CMOS MEMS technology. The micro Pirani vacuum gauge features three serpentine-shaped molybdenum thermistors on the suspended silicon-on-insulator (SOI)
Wei Xu, Xiaoyi Wang, Xiaofang Pan, A. Bermak, Yi-Kuen Lee, Yatao Yang   +5 more
semanticscholar   +1 more source

A CMOS MEMS Thermal Flow Sensor for Gas and Liquid With Parylene-C Coating

IEEE Transactions on Electron Devices, 2021
This brief presents a self-heated thermoresistive flow (SHTF) sensor for both gas and liquid with Parylene-C coating using a 0.35- $ \mu \text{m}$ CMOS MEMS technology.
W. Xu, Xiaoyi Wang, B. Mousa, M. Paszkiewicz, Yi-Kuen Lee   +4 more
semanticscholar   +1 more source

CMOS-MEMS VOC sensors functionalized via inkjet polymer deposition for high-sensitivity acetone detection.

Lab on a Chip, 2021
CMOS-MEMS microresonators have become excellent candidates for developing portable chemical VOC sensing systems thanks to their extremely large mass sensitivity, extraordinary miniaturization capabilities, and on-chip integration with CMOS circuitry to ...
R. Perelló-Roig, J. Verd, S. Bota, Bartomeu Soberats, Antonio Costa, J. Segura   +5 more
semanticscholar   +1 more source