Results 111 to 120 of about 392,135 (196)

CMOS-Based Gas Direction Sensors with a Surface-Integrated Pillar. [PDF]

open access: yesSensors (Basel)
Yodo Y   +5 more
europepmc   +1 more source

Development of Vacuum-Chamber-Type Capacitive Micro-Pressure Sensors. [PDF]

open access: yesMicromachines (Basel)
Yang LJ   +5 more
europepmc   +1 more source

Fabrication of High-Density Multimodal Neural Probes Based on Heterogeneously Integrated CMOS. [PDF]

open access: yesAdv Sci (Weinh)
Mun JH   +10 more
europepmc   +1 more source

Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers

Journal of microelectromechanical systems, 2023
This work, for the first time, presents a platform for designing microelectromechanical system (MEMS) capacitive transducers featuring multiple transduction gaps implemented by a traditional $0.18~\mu \text{m}$ 1-Poly-6-Metal (1P6M) complementary metal ...
Hung-Yu Chen   +4 more
semanticscholar   +1 more source

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

open access: yesProcesses, 2022
The complementary metal-oxide-semiconductor (CMOS) process is the main stream to fabricate integrated circuits (ICs) in the semiconductor industry. Microelectromechanical systems (MEMS), when combined with CMOS electronics to form the CMOS MEMS process ...
Lung-Jieh Yang   +2 more
exaly   +2 more sources

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