Results 91 to 100 of about 227,472 (115)

Single-Die-Level MEMS Post-Processing for Prototyping CMOS-Based Neural Probes Combined with Optical Fibers for Optogenetic Neuromodulation

Micromachines
The integration of complementary metal–oxide–semiconductor (CMOS) and micro-electromechanical systems (MEMSs) technologies for miniaturized biosensor fabrication enables unprecedented spatiotemporal resolution in monitoring the bioelectrical activity of ...
Gabor Orban, Alberto Perna, Matteo Vincenzi, Raffaele Adamo, Gian Nicola Angotzi, Luca Berdondini, João Filipe Ribeiro   +6 more
doaj   +1 more source

Comprehensive Die Shear Test of Silicon Packages Bonded by Thermocompression of Al Layers with Thin Sn Capping or Insertions

Micromachines, 2018
Thermocompression bonding for wafer-level hermetic packaging was demonstrated at the lowest temperature of 370 to 390 °C ever reported using Al films with thin Sn capping or insertions as bonding layer.
Shiro Satoh, Hideyuki Fukushi, Masayoshi Esashi, Shuji Tanaka   +3 more
doaj   +1 more source

Multiphysics Optical–Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber

Sensors
Infrared (IR) thermal sensors on CMOS-SOI-MEMS platforms enable scalable, low-cost thermal imaging but require optimized optical, thermal, and mechanical performance.
Moshe Avraham, Yael Nemirovsky
doaj   +1 more source

Design Considerations of an Analog Voltage Mode Readout Circuit for the CMOS-SOI-MEMS Gas Sensor Dubbed GMOS

Micromachines
Modern gas sensor technology is becoming an important part of our lives. Hence, there has been considerable effort over the past 25 years towards the goal of creating low-cost gas sensors by employing modern microelectronics technology to manufacture ...
Efraim-Lavi Bukshish, Sharon Bar-Lev, Tanya Blank, Yael Nemirovsky   +3 more
doaj   +1 more source

A CMOS-MEMS RF-tunable bandpass filter based on two high-Q 22-MHz polysilicon clamped-clamped beam resonators

, 2009
This letter presents the design, fabrication, and demonstration of a CMOS-MEMS filter based on two high-Q submicrometer-scale clamped-clamped beam resonators with resonance frequency around 22 MHz.
Giner, Joan, Barniol, Núria, López, Joan Lluis, Uranga, Arantxa, Murillo Rodríguez, Gonzalo, Verd, Jaume, Abadal, Gabriel, Torres, Francesc   +7 more
core   +1 more source

DESIGN OF SMART SENSORS FOR DETECTION OF PHYSICAL QUANTITIES [PDF]

, 2010
Microsystems and integrated smart sensors represent a flourishing business thanks to the manifold benefits of these devices with respect to their respective macroscopic counterparts.
DEI, MICHELE
core  

Design and fabrication of RF MEMS switch by CMOS process

, 2011
This work investigates the fabrication of a RF (ratio frequency) MEMS (micro elector mechanical system) switch using the standard 0.35 μm 2P4M (double polysilicon four metal) CMOS (complementary metal oxide semiconductor) process and the post-process ...
Wu, C.C.
core   +1 more source

A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array

Microsystems & Nanoengineering
This paper presents a highly sensitive CMOS-MEMS system-on-chip (SoC) for multiparameter sensing, achieved through the monolithic integration of a capacitive microcantilever array with on-chip signal processing circuitry.
Feiyun Wang, Xuan Ouyang, Linze Hong, Xiangyu Song, Wei Xu   +4 more
doaj   +1 more source

A micromachined zipping variable capacitor

, 2010
Micro-electro-mechanical systems (MEMS) have become ubiquitous in recent years and are found in a wide range of consumer products. At present, MEMS technology for radio-frequency (RF) applications is maturing steadily, and significant improvements have ...
Pu, Suan-Hui
core   +1 more source

CMOS-MEMS Micromechanical Filters

, 2014
本計畫擬以CMOS (complementary metal oxide semiconductor)-MEMS (microelectromechanical systems)技術研製整合讀出電路的微機械式濾波器，適合應用在無線射頻通訊系統。就國內外的發展現況，利用CMOS- MEMS技術，將微機械式濾波器與電路整合製作在單一晶片上，是一種新的技術，相關的技術產品，尚未被商品化。本計畫將發展高品質因子和低驅動電壓的微機械式濾波器。主要的創新性，包括(1)利用商業化CMOS製程製作機械式微濾波器；(2 ...
戴慶良
core