Results 51 to 60 of about 227,472 (115)

A CMOS MEMS Pressure Sensor for Blood Pulse and Pressure Measurement Applications

, 2022
A CMOS MEMS pressure sensor for blood pulse and pressure measurement applications is proposed. A capacitive MEMS sensor implemented in UMC 0.18 μm CMOS MEMS process is adopted to sense blood pulses and pressure.
Shih, Horng-Yuan;Hsin, Chin-Te;Yang, Cheng-Wei;Chen, Hsin-Liang;Kuo, Jhe-Yuan
core   +1 more source

Study of the communication distance of a MEMS Pressure Sensor Integrated in a RFID Passive Tag

Advances in Electrical and Computer Engineering, 2012
The performance of a MEMS (Micro Electro-Mechanical Systems) Sensor in a RFID system has been calculated, simulated and analyzed. It documents the viability - from the power consumption point of view - of integrating a MEMS sensor in a passive tag ...
FERNANDEZ, I., ASENSIO, A., GUTIERREZ, I., GARCIA, J., REBOLLO, I., de NO, J.   +5 more
doaj   +1 more source

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

Micromachines, 2018
The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS)
Haotian Liu, Li Zhang, King Ho Holden Li, Ooi Kiang Tan   +3 more
doaj   +1 more source

Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Sensors, 2020
Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing.
Rafel Perello-Roig, Jaume Verd, Sebastià Bota, Jaume Segura   +3 more
doaj   +1 more source

Design and analysis of piezoelectric MEMS micro‐speaker based on scandium‐doped AlN thin film

Micro & Nano Letters, 2021
Piezoelectric MEMS microspeakers are promising candidates for miniaturized speakers, such as for in‐ear applications. Using lead‐free scandium doped aluminium nitride (ScAlN) thin film instead of lead zirconium titanate helps these speakers to be ...
Ahmed Fawzy, Yiming Lang, Menglun Zhang
doaj   +1 more source

Transport–Reaction–Signal Coupling in Lateral Flow Assays for Next‐Generation Point‐of‐Care Diagnostics

Advanced Science, EarlyView.
Lateral flow assays are evolving into interdisciplinary, system‐level sensing platforms. Recent innovations are deconstructed through coupled phases of mass transfer, reaction, and signal transduction, revealing interdependence across porous materials, interfacial chemistry, nanolabels, readout devices, and data‐enabled analysis.
Yan Pan, Yuewei Li, Chao Mi, Zhengwen Yang, Lana McClements, Steven J. Langford, Jiayan Liao   +6 more
wiley   +1 more source

Zero-level packaging of MEMS in standard CMOS technology

, 2010
A novel technique for global packaging of MEMS devices using standard CMOS technology is presented. A MEMS polysilicon resonator is fabricated and on-chip packaged using two metal layers already available from the CMOS technology.
Torres, Francisco, Giner, Joan Josep, Marigó, Eloi, Barniol, Núria, Murillo Rodríguez, Gonzalo, Uranga, Arantxa, Lopez, Joan Lluis, Esteve, Jaume, Abadal, Gabriel   +8 more
core   +1 more source

SOI CMOS MEMS infra-red thermal source with carbon nanotubes coating [PDF]

, 2014
This abstract presents the development of a Silicon-on-Insulator (SOI) CMOS micro-electro-mechanical (MEMS) micro-hotplate based infra-red (IR) light source employing a vertically aligned multi-walled carbon nanotubes (VA- MWCNTs) emission layer.
Cole, M.T., De Luca, A, Cole, Matthew, Cole, Matthew T., Udrea, F., Ali, Syed Z., Hopper, R.H., Milne, W.I., Ali, S.Z., Milne, W I, Milne, W. I., De Luca, A., Gardner, J. W., Gardner, J.W., Ali, S. Z., Udrea, Florin, Hopper, R. H.   +16 more
core   +1 more source

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

, 2023
The complementary metal-oxide-semiconductor (CMOS) process is the main stream to fabricate integrated circuits (ICs) in the semiconductor industry. Microelectromechanical systems (MEMS), when combined with CMOS electronics to form the CMOS MEMS process ...
Yang, Lung-Jieh;Waikhom, Reshmi;Shih, Horng-Yuan;Lee, Yi-Kuen
core   +1 more source

Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone

Proceedings, 2020
In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the ...
Richard Hopper, Daniel Popa, Vasileios Tsoutsouras, Florin Udrea, Phillip Stanley-Marbell   +4 more
doaj   +1 more source