Results 51 to 60 of about 7,213 (255)
A CMOS-MEMS lateral-axis gyroscope [PDF]
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), 2002 This paper reports on the experimental results from the first design of a CMOS lateral-axis vibratory gyroscope that utilizes comb fingers for both actuation and sensing. The fabrication is compatible with standard CMOS processes and the design has an integrated, fully-differential capacitive interface circuit.
Huikai Xie, Fedder, Gary K.
openaire +1 more source
CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis [PDF]
, 2017 The final publication is available at Springer via http://dx.doi.org/10.1007/s00542-016-2878-3An optimized CMOS-MEMS resonant pressure sensor with enhanced sensitivity at atmospheric pressure has been reported in this paper.
Banerji, Saoni +5 more
core +2 more sources
Resonant Body Transistors in IBM's 32nm SOI CMOS technology [PDF]
, 2012 This work presents an unreleased CMOS-integrated MEMS resonators fabricated at the transistor level of IBM's 32SOI technology and realized without the need for any post-processing or packaging.
Daniel, Luca +4 more
core +1 more source
Low-Cost Microbolometer Type Infrared Detectors
Micromachines, 2020 The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications.
Le Yu +5 more
doaj +1 more source
A Comparative Study Between a Micromechanical Cantilever Resonator and MEMS-based Passives for Band-pass Filtering Application [PDF]
, 2011 Over the past few years, significant growth has been observed in using MEMS based passive components in the RF microelectronics domain, especially in transceiver components.
Anirban Bhattacharya +7 more
core +1 more source
3D‐Printed Porous Hydroxyapatite Formed via Enzymatic Mineralization
Advanced Functional Materials, EarlyView.Bone combines lightness, strength, and the ability to heal, inspiring new materials design. This work introduces a room‐temperature, enzyme‐mediated 3D printing method to create porous hydroxyapatite scaffolds. The process avoids energy‐intensive sintering, preserves bioactivity, and allows control over porosity and mineralization.
Francesca Bono +6 more
wiley +1 more source
Japanese Journal of Applied Physics, 2014 This paper reports the design and evaluation results of a capacitive CMOS–MEMS sensor that consists of the proposed sensor circuit and a capacitive MEMS device implemented on the circuit. To design a capacitive CMOS–MEMS sensor, a multi-physics simulation of the electromechanical behavior of both the MEMS structure and the sensing LSI was carried out ...
Toshifumi Konishi +5 more
openaire +2 more sources
Implantable micromechanical parylene-based pressure sensors for unpowered intraocular pressure sensing [PDF]
, 2007 This paper presents the first implantable, unpowered, parylene-based microelectromechanical system (MEMS) pressure sensor for intraocular pressure (IOP) sensing.
Agrawal, Rajat +7 more
core +1 more source
Advanced Functional Materials, EarlyView.Flexible piezoresistive pressure sensors underpin wearable and soft electronics. This review links sensing physics, including contact resistance modulation, quantum tunneling and percolation, to unified materials/structure design. We highlight composite and graded architectures, interfacial/porous engineering, and microstructured 3D conductive networks
Feng Luo +2 more
wiley +1 more source
Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures
IEEE Journal of the Electron Devices Society, 2017 In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 μm 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically.
F. Y. Kuo +5 more
doaj +1 more source