A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure. [PDF]
Micromachines (Basel), 2016 Huang JQ, Li B, Chen W.
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Conception et intégration de circuits CMOS et de microsystèmes électromécaniques (MEMS) pour la synthèse d'un oscillateur à haute performance [PDF]
, 2019 Philippe-Olivier Beaulieu
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Design and CMOS Technology Optimization of a Low Power MEMS Pierce Oscillator
, 2014 Emmanuel C. Onyema
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Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique. [PDF]
Sensors (Basel), 2015 Fong CF, Dai CL, Wu CC.
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Modeling of Thermal Conductivity for a CMOS-Compatible MEMS-ROIC Contact by TiN Nanotubes
, 2019 Marvin Michel, H. Vogt
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Ethanol microsensors with a readout circuit manufactured using the CMOS-MEMS technique. [PDF]
Sensors (Basel), 2015 Yang MZ, Dai CL.
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Design and fabrication of micromirror for MOEMS devices by CMOS-MEMS common process
, 2005 Chien-Chung Tsai +2 more
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Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor. [PDF]
Sensors (Basel), 2015 Dennis JO +3 more
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