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Advances of CMOS-MEMS technology for resonator applications
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013 This paper reports on recent progress on high-Q integrated micromechanical resonators using “CMOS-MEMS technology” to enable monolithic integration of MEMS and CMOS. Specifically, we take advantage of IC and semiconductor strength in Taiwan to develop several CMOS-MEMS resonator platforms targeted for inherent integration of MEMS and circuitry towards ...openaire +1 more sourceCMOS-MEMS
2012 Dimitrios Peroulis, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, Gilbert Daniel Nessim, Francelyne Marano, Rina Guadagnini, Fernando Rodrigues-Lima, Jean-Marie Dupret, Armelle Baeza-Squiban, Sonja Boland, Jeong Young Park, Seajin Oh, Marc Madou, Yoke Khin Yap, Burcu Aslan, Hee Dong Han, Gabriel Lopez-Berestein, Anil K. Sood, Michael S.-C. Lu, Hongwei Qu, Huikai Xie, Huikai Xie, Ying Zhou, Larry L. Howell, A. T. Conlisk, Leonid V. Zhigilei, Alexey N. Volkov, Avinash M. Dongare, Zheng Yin, Yubo Fan, Stephen TC Wong, Vishal V. R. Nandigana, N. R. Aluru, Weicong Li, Harry Kwok, Reinhold Wannemacher +39 moreopenaire +1 more sourceCMOS MEMS Biosensors
2012 Dimitrios Peroulis, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, Gilbert Daniel Nessim, Francelyne Marano, Rina Guadagnini, Fernando Rodrigues-Lima, Jean-Marie Dupret, Armelle Baeza-Squiban, Sonja Boland, Jeong Young Park, Seajin Oh, Marc Madou, Yoke Khin Yap, Burcu Aslan, Hee Dong Han, Gabriel Lopez-Berestein, Anil K. Sood, Michael S.-C. Lu, Hongwei Qu, Huikai Xie, Huikai Xie, Ying Zhou, Larry L. Howell, A. T. Conlisk, Leonid V. Zhigilei, Alexey N. Volkov, Avinash M. Dongare, Zheng Yin, Yubo Fan, Stephen TC Wong, Vishal V. R. Nandigana, N. R. Aluru, Weicong Li, Harry Kwok, Reinhold Wannemacher +39 moreopenaire +1 more sourceCMOS MEMS Fabrication Technologies
2012 Dimitrios Peroulis, Prashant R. Waghmare, Sushanta K. Mitra, Supone Manakasettharn, J. Ashley Taylor, Tom N. Krupenkin, Wenguang Zhu, Gilbert Daniel Nessim, Francelyne Marano, Rina Guadagnini, Fernando Rodrigues-Lima, Jean-Marie Dupret, Armelle Baeza-Squiban, Sonja Boland, Jeong Young Park, Seajin Oh, Marc Madou, Yoke Khin Yap, Burcu Aslan, Hee Dong Han, Gabriel Lopez-Berestein, Anil K. Sood, Michael S.-C. Lu, Hongwei Qu, Huikai Xie, Huikai Xie, Ying Zhou, Larry L. Howell, A. T. Conlisk, Leonid V. Zhigilei, Alexey N. Volkov, Avinash M. Dongare, Zheng Yin, Yubo Fan, Stephen TC Wong, Vishal V. R. Nandigana, N. R. Aluru, Weicong Li, Harry Kwok, Reinhold Wannemacher +39 moreopenaire +1 more source
