Results 161 to 170 of about 7,213 (255)
CMOS fabrication process as utilised in Micro-Electro-Mechanical Systems (MEMS) technology
Chris Chatwin
openalex +1 more source
Using MEMS Capacitive Switches in Tunable RF Amplifiers
A MEMS capacitive switch suitable for use in tunable RF amplifiers is described. A MEMS switch is designed, fabricated, and characterized with physical and RF measurements for inclusion in simulations.
doaj
Optimization of a Piezoelectric Energy Harvester and Design of a Charge Pump Converter for CMOS-MEMS Monolithic Integration. [PDF]
Duque M +4 more
europepmc +1 more source
Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process. [PDF]
Cai C, Tan J, Hua D, Qin M, Zhu N.
europepmc +1 more source
A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection. [PDF]
Perelló-Roig R +4 more
europepmc +1 more source

