Results 191 to 196 of about 392,135 (196)

A wafer-level encapsulated CMOS MEMS thermoresistive calorimetric flow sensor with integrated packaging design

IEEE/LEOS International Conference on Optical MEMS, 2017
Wei Xu, Bo Gao, Moaaz Ahmed, Mingzheng Duan, Bo Wang, Saqib Mohamad, A. Bermak, Yi-Kuen Lee   +7 more
semanticscholar   +1 more source

Single-Resonator Dual-Frequency BEOL-Embedded CMOS-MEMS Oscillator With Low-Power and Ultra-Compact TIA Core

IEEE Electron Device Letters, 2017
M. Riverola, G. Sobreviela, F. Torres, A. Uranga, N. Barniol   +4 more
semanticscholar   +1 more source

A CMOS-MEMS clamped–clamped beam displacement amplifier for resonant switch applications

, 2018
Jia-Ren Liu, Shih-Chuan Lu, Chun-Pu Tsai, Wei-Chang Li   +3 more
semanticscholar   +1 more source

MEMS-CMOS-MEMS platform

2017
LLOYD STEPHEN, GURIN ILYA
openaire   +1 more source

CMOS-MEMS-CMOS platform

2017
SMEYS PETER, LIM MARTIN
openaire   +2 more sources

CAPACITOR WITH PLANARIZED BONDING FOR CMOS-MEMS INTEGRATION

2016
SHEN WEI-CHENG, CHANG YI-HSIEN, TSAI YI HENG, WU TZU-HENG, CHENG CHUN-REN, CHENG CHUN-WEN   +5 more
openaire   +2 more sources