Results 151 to 160 of about 392,135 (196)

A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor With Temperature Compensation

Journal of microelectromechanical systems, 2019
In this paper, we propose a new 1D thermoresistive micro calorimetric flow (TMCF) sensor model for moist airflow with the temperature-dependent thermophysical properties.
W. Xu, Shenhui Ma, Xiaoyi Wang, Y. Chiu, Yi-Kuen Lee   +4 more
semanticscholar   +1 more source

CMOS MEMS Thermoelectric Infrared Sensor With Plasmonic Metamaterial Absorber for Selective Wavelength Absorption and Responsivity Enhancement

IEEE Sensors Journal, 2020
This study demonstrates the integration of thermoelectric type MEMS infrared (IR) sensor with plasmonic metamaterial absorber (PMA) through a standard CMOS process platform to improve the responsivity of MEMS IR sensor in a specific range of wavelength ...
Pen-Sheng Lin, Ting-Wei Shen, K. Chan, W. Fang   +3 more
semanticscholar   +1 more source

Fully Integrated Bidirectional CMOS-MEMS Flow Sensor With Low Power Pulse Operation

IEEE Sensors Journal, 2019
Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas flow.
Moaaz Ahmed, Wei Xu, Saqib Mohamad, F. Boussaid, Yi-Kuen Lee, A. Bermak   +5 more
semanticscholar   +1 more source

(Invited) CMOS MEMS Integration

ECS Transactions, 2011
The "More than Moore" trend in the microelectronics industry is driving a renewed interest in mixed-physics CMOS MEMS integration. Integration becomes a necessity for multi-component microsystems, where interconnect issues are significant. Integration also drives down parasitic capacitances and provides opportunities for ultra-low-power microsystems ...
openaire   +1 more source

Built-in self test of CMOS-MEMS accelerometers

Proceedings. International Test Conference, 2003
A built-in self-test technique for MEMS that is applicable to symmetrical microstructures is described. A combination of existing layout features and additional circuitry is used to make measurements from symmetrically-located points. In addition to the normal sense output, self-test outputs are used to detect the presence of layout asymmetry that are ...
Nilmoni Deb, R. D. (Shawn) Blanton
openaire   +1 more source

A CMOS-MEMS Thermal-Piezoresistive Oscillator for Mass Sensing Applications

IEEE Transactions on Electron Devices, 2020
We present a thermally driven piezoresistively sensed resonator primarily consisting of backend of line (BEOL) CMOS material for mass sensing applications. A detailed analysis of the operation mechanism has been performed to develop a mathematical and an
A. Zope, Jung-Hao Chang, Ting-Yuan Liu, Sheng-Shian Li   +3 more
semanticscholar   +1 more source

A compact CMOS MEMS microphone with 66dB SNR

2009 IEEE International Solid-State Circuits Conference - Digest of Technical Papers, 2009
Silicon MEMS microphones that offer small size, ease of integration with CMOS electronics, and the ability to withstand lead-free solder reflow cycles, are becoming increasingly popular for high-volume consumer electronic products, and are competing in price and performance with traditional electret condenser microphones [1].
Jelena Citakovic, Per F. Hovesten, Gino Rocca, Aart van Halteren, Pirmin Rombach, Lars J. Stenberg, Pietro Andreani, Erik Bruun   +7 more
openaire   +1 more source

Monolithic Integration of Pressure/Humidity/Temperature Sensors for CMOS-Mems Environmental Sensing Hub with Structure Designs for Performances Enhancement

IEEE/LEOS International Conference on Optical MEMS, 2020
This study presents a monolithic integration of pressure, humidity and temperature sensing units to achieve an environmental sensing hub (Fig. 1). The proposed environmental sensing hub is realized using the TSMC $0.18\mu \mathrm{m}$ 1P6M CMOS platform ...
Yung-Chian Lin, Ping-Hsiu Hong, Sheng-Kai Yeh, Cheng-Chun Chang, W. Fang   +4 more
semanticscholar   +1 more source

Design of CMOS-MEMS infrared emitter arrays

2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2016
This paper presents a new design of complementary metal-oxide-semiconductor-microelectromechanical systems (CMOS-MEMS) infrared emitter arrays integrated with metamaterial absorbers (MA). The infrared emitter array is a key IR thermal radiation source for gas sensors.
Zhengxi Cheng, Hiroshi Toshiyoshi
openaire   +1 more source

A Closed-Loop Controlled CMOS MEMS Biaxial Scanning Mirror for Projection Displays

IEEE Sensors Journal, 2020
This work presents a biaxial electromag- netically-driven piezoresistively sensed scanning mirror fabricated in a CMOS (complementary metal oxide semiconductor) process.
Cho-Chuan Tsai, Zhong-He Li, Yu-Tang Lin, M. S. Lu   +3 more
semanticscholar   +1 more source