Results 31 to 40 of about 6,984 (242)
CMOS-MEMS Oscillator Architecture and Phase Noise: A Mini-Review
Frontiers in Mechanical Engineering, 2022 Over the past two decades, the advancement in microelectromechanical systems (MEMS) has been making headway in the development of miniaturized mechanical structures with integrated electronics.
Ming-Huang Li
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CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor
Micro and Nano Systems Letters, 2021 LC CMOS voltage-controlled oscillators (VCOs) with tunable inductors are essential for high-performance, multi-band communication systems, such as IoT applications and 5G communication.
Uikyu Chae +4 more
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CMOS-MEMS Vibro-Impact Devices and Applications
Frontiers in Mechanical Engineering, 2022 CMOS-MEMS-based vibro-impact devices that utilize impact-induced nonlinear dynamics have been shown to yield unique and unprecedented functionalities with on-chip integration capability.
Chun-Pu Tsai, Wei-Chang Li
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Manufacturing Issues of BEOL CMOS-MEMS Devices
IEEE Access, 2021 In this paper we present a comprehensive report on the issues found during the manufacturing of high-yield CMOS-MEMS sensors based on vapor-phase hydrogen fluoride (vapor- $HF$ ) oxide etching.
Juan Valle +3 more
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Monolithic ultrasound fingerprint sensor. [PDF]
, 2017 This paper presents a 591×438-DPI ultrasonic fingerprint sensor. The sensor is based on a piezoelectric micromachined ultrasonic transducer (PMUT) array that is bonded at wafer-level to complementary metal oxide semiconductor (CMOS) signal processing ...
Boser, Bernhard E +7 more
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Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing. [PDF]
, 2013 This paper is intended to describe the design and manufacturing aspects of a simple micromachined capacitive pressure sensor working in the pressure range of 0-1000 mbar. 500 µm thick Borofloat® 33 glass and silicon wafers were used as substrates.
Csikósné Pap, Andrea Edit +2 more
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Porous Alumina Based Capacitive MEMS RH Sensor [PDF]
, 2008 The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity (RH) sensor that can be incorporated into a state-of-the-art, wireless ...
Desmulliez, Marc +4 more
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SI-based unreleased hybrid MEMS-CMOS resonators in 32nm technology [PDF]
, 2012 This work presents the first unreleased Silicon resonators fabricated at the transistor level of a standard CMOS process, and realized without any release steps or packaging.
Marathe, Radhika A. +2 more
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Experiments on MEMS Integration in 0.25 μm CMOS Process
Sensors, 2018 In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology.
Piotr Michalik +4 more
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Design, fabrication and characterization of monolithic embedded parylene microchannels in silicon substrate [PDF]
, 2006 This paper presents a novel channel fabrication technology of bulk-micromachined monolithic embedded polymer channels in silicon substrate. The fabrication process favorably obviates the need for sacrifical materials in surface-micromachined channels and
Chen, Po-Jui +2 more
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