Results 41 to 50 of about 2,629 (140)
Proceedings, 2018 This study implements the metal-oxide-semiconductor (MOS) type gas sensor using the TSMC 0.35 μm 2P4M process. The gas concentration is detected based on the resistance change measured by the proposed sensor.
Ya-Chu Lee +3 more
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Study of the communication distance of a MEMS Pressure Sensor Integrated in a RFID Passive Tag
Advances in Electrical and Computer Engineering, 2012 The performance of a MEMS (Micro Electro-Mechanical Systems) Sensor in a RFID system has been calculated, simulated and analyzed. It documents the viability - from the power consumption point of view - of integrating a MEMS sensor in a passive tag ...
FERNANDEZ, I. +5 more
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Design and analysis of piezoelectric MEMS micro‐speaker based on scandium‐doped AlN thin film
Micro & Nano Letters, 2021 Piezoelectric MEMS microspeakers are promising candidates for miniaturized speakers, such as for in‐ear applications. Using lead‐free scandium doped aluminium nitride (ScAlN) thin film instead of lead zirconium titanate helps these speakers to be ...
Ahmed Fawzy, Yiming Lang, Menglun Zhang
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Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone
Proceedings, 2020 In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the ...
Richard Hopper +4 more
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Differential Wide Temperature Range CMOS Interface Circuit for Capacitive MEMS Pressure Sensors
Sensors, 2015 We describe a Complementary Metal-Oxide Semiconductor (CMOS) differential interface circuit for capacitive Micro-Electro-Mechanical Systems (MEMS) pressure sensors that is functional over a wide temperature range between −55 °C and 225 °C. The circuit is
Yucai Wang, Vamsy P. Chodavarapu
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EngThis article presents a framework of using MEMS sensors to investigate unsteady flow speeds of a flapping wing or the new concept of sensors on flapping wings (SOFWs).
Lung-Jieh Yang +4 more
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AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications
Micromachines, 2018 Current CMOS-micro-electro-mechanical systems (MEMS) fabrication technologies permit cardiological implantable devices with sensing capabilities, such as the iStents, to be developed in such a way that MEMS sensors can be monolithically integrated ...
Jose Angel Miguel +2 more
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Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout
Microsystems & NanoengineeringTerahertz (THz) detectors using MEMS resonators have attracted great interests owing to their high sensitivity, rapid response, and room-temperature operation capability.
Ya Zhang +8 more
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A 164-dBΩ Transimpedance Amplifier for Monolithic CMOS-MEMS Oscillators in Biosensing Applications
IEEE AccessThis article presents a fully differential tunable high-gain transimpedance amplifier (TIA) conceived as a front-end circuit for monolithic CMOS-MEMS resonators operating in self-sustained oscillation mode.
Rafel Perello-Roig +4 more
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A High-Temperature, Low-Noise Readout ASIC for MEMS-Based Accelerometers
Sensors, 2019 This paper presents the development and measurement results of a complementary metal oxide semiconductor (CMOS) readout application-specific integrated circuit (ASIC) for bulk-silicon microelectromechanical system (MEMS) accelerometers. The proposed ASIC
Min Qi, An-qiang Guo, Dong-hai Qiao
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