Results 41 to 50 of about 6,984 (242)
CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis [PDF]
, 2017 The final publication is available at Springer via http://dx.doi.org/10.1007/s00542-016-2878-3An optimized CMOS-MEMS resonant pressure sensor with enhanced sensitivity at atmospheric pressure has been reported in this paper.
Banerji, Saoni +5 more
core +2 more sources
A comprehensive high-level model for CMOS-MEMS resonators [PDF]
, 2018 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new ...
Banerji, Saoni +2 more
core +2 more sources
Frontiers in Mechanical Engineering, 2022 MEMS accelerometers have been widely used in various applications with a wide range of signal levels and bandwidth. Therefore it is desired to have a sensor whose characteristics such as sensitivity and bandwidth can be reconfigured/tuned depending on ...
Yi Chiu, Cheng-Yen Lin, Hao-Chiao Hong
doaj +1 more source
Characterization of an embedded RF-MEMS switch [PDF]
, 2010 An RF-MEMS capacitive switch for mm-wave integrated circuits, embedded in the BEOL of 0.25μm BiCMOS process, has been characterized. First, a mechanical model based on Finite-Element-Method (FEM) was developed by taking the residual stress of the thin ...
Ehwald, K. E. +10 more
core +1 more source
Resonant Body Transistors in IBM's 32nm SOI CMOS technology [PDF]
, 2012 This work presents an unreleased CMOS-integrated MEMS resonators fabricated at the transistor level of IBM's 32SOI technology and realized without the need for any post-processing or packaging.
Daniel, Luca +4 more
core +1 more source
Characterization of CMOS-MEMS Resonant Pressure Sensors [PDF]
IEEE Sensors Journal, 2017 IEEE Comprehensive characterization results of a CMOS-MEMS resonant pressure sensor are presented. We have extensively evaluated the key performance parameters of our device in terms of quality factor (Q) variations under variable conditions of temperature and pressure, characterized by Knudsen number (Kn).
Banerji, Saoni +2 more
openaire +3 more sources
Thermal profiles within the channel of planar gunn diodes using micro-particle sensors [PDF]
, 2017 The paper describes the use of a novel microparticle sensor (~3 μm diameter) and infra-red (IR) microscopy to measure the temperature profile within the active channel (typically 3 μm length and 120 μm width) of planar Gunn diodes. The method has enabled
Bajo, Miguel Montes +6 more
core +2 more sources
A Test Setup for the Characterization of Lorentz-Force MEMS Magnetometers
IEEE Open Journal of Circuits and Systems, 2021 Lorentz-force MEMS magnetometers are interesting candidates for the replacement of magnetometers in consumer electronics products. Plenty of works in the literature propose MEMS magnetometers, their readout circuits and modulations.
Josep Maria Sanchez-Chiva +3 more
doaj +1 more source
Floating-disk parylene microvalve for self-regulating biomedical flow controls [PDF]
, 2008 A novel self-regulating parylene micro valve is presented in this paper with potential applications for biomedical flow controls. Featuring a free-floating bendable valve disk and two-level valve seat, this surface-micromachined polymeric valve ...
Chen, Po-Jui +3 more
core +1 more source
On the integration of ultrananocrystalline diamond (UNCD) with CMOS chip
AIP Advances, 2017 A low temperature deposition of high quality ultrananocrystalline diamond (UNCD) film onto a finished Si-based CMOS chip was performed to investigate the compatibility of the UNCD deposition process with CMOS devices for monolithic integration of MEMS on
Hongyi Mi +8 more
doaj +1 more source