Results 51 to 60 of about 6,984 (242)
Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip [PDF]
, 2010 100學年度研究獎補助論文[[abstract]]The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film
Barrettino +24 more
core +3 more sources
Resonant body transistors in standard CMOS technology [PDF]
, 2012 This work presents Si-based electromechanical resonators fabricated at the transistor level of a standard SOI CMOS technology and realized without the need for any postprocessing or packaging.
Daniel, Luca +4 more
core +2 more sources
A CMOS-MEMS lateral-axis gyroscope [PDF]
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), 2002 This paper reports on the experimental results from the first design of a CMOS lateral-axis vibratory gyroscope that utilizes comb fingers for both actuation and sensing. The fabrication is compatible with standard CMOS processes and the design has an integrated, fully-differential capacitive interface circuit.
Huikai Xie, Fedder, Gary K.
openaire +1 more source
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
Sensors, 2011 This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive
Mohd Haris Md Khir, Hongwei Qu, Peng Qu
doaj +1 more source
CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology [PDF]
, 2016 This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach.
Barniol i Beumala, Núria +2 more
core +3 more sources
Low-Cost Microbolometer Type Infrared Detectors
Micromachines, 2020 The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications.
Le Yu +5 more
doaj +1 more source
A mixed-signal control system for Lorentz-force resonant MEMS magnetometers [PDF]
, 2019 This paper presents a mixed-signal closed-loop control system for Lorentz force resonant MEMS magnetometers. The control system contributes to 1) the automatic phase control of the loop, that allows start-up and keeps self-sustained oscillation at the ...
Fernández, Daniel +3 more
core +2 more sources
In Situ Study of Resistive Switching in a Nitride‐Based Memristive Device
Advanced Functional Materials, EarlyView.In situ TEM biasing experiment demonstrates the volatile I‐V characteristic of MIM lamella device. In situ STEM‐EELS Ti L2/L3 ratio maps provide direct evidence of the oxygen vacancies migrations under positive/negative electrical bias, which is critical for revealing the RS mechanism for the MIM lamella device.
Di Zhang +19 more
wiley +1 more source
Japanese Journal of Applied Physics, 2014 This paper reports the design and evaluation results of a capacitive CMOS–MEMS sensor that consists of the proposed sensor circuit and a capacitive MEMS device implemented on the circuit. To design a capacitive CMOS–MEMS sensor, a multi-physics simulation of the electromechanical behavior of both the MEMS structure and the sensing LSI was carried out ...
Toshifumi Konishi +5 more
openaire +2 more sources
Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone
Scientific Reports, 2022 We present a miniaturised thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical ...
Richard Hopper +4 more
doaj +1 more source