Results 131 to 140 of about 6,180 (208)
Desenvolvimento de um protótipo analisador de vibração de baixo custo para uso em manutenção preditiva [PDF]
, 2014 Dissertação (mestrado) - Universidade Federal de Santa Catarina, Centro Tecnológico, Programa de Pós- Graduação em Engenharia Mecânica, Florianópolis, 2014.No presente trabalho foi desenvolvido e avaliado um protótipo de equipamento de análise de ...
González, Roberto Carlos Díaz
core
Poly-SiGe for MEMS-above-CMOS sensors
, 2014 Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS ...
Gonzalez Ruiz, Pilar +2 more
core +1 more source
MicromachinesModern gas sensor technology is becoming an important part of our lives. Hence, there has been considerable effort over the past 25 years towards the goal of creating low-cost gas sensors by employing modern microelectronics technology to manufacture ...
Efraim-Lavi Bukshish +3 more
doaj +1 more source
CMOS-MEMS Micromechanical Filters
, 2014 本計畫擬以CMOS (complementary metal oxide semiconductor)-MEMS (microelectromechanical systems)技術研製整合讀出電路的微機械式濾波器，適合應用在無線射頻通訊系統。就國內外的發展現況，利用CMOS- MEMS技術，將微機械式濾波器與電路整合製作在單一晶片上，是一種新的技術，相關的技術產品，尚未被商品化。本計畫將發展高品質因子和低驅動電壓的微機械式濾波器。主要的創新性，包括(1)利用商業化CMOS製程製作機械式微濾波器；(2 ...
戴慶良
core
, 2014 MEMS sensors are promising for Energy Efficient Building (EeB) because of the potential low cost and low power consumption. Various flow sensors based on MEMS technology have been fabricated.
Lin, Chia Wei +9 more
core +1 more source
A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology. [PDF]
Sensors (Basel), 2020 Chen CF, Shen CH, Yeh YY.
europepmc +1 more source
Millimeter-Wave Reconfigurable CMOS-MEMS Integrated Devices [PDF]
, 2017 The millimeter-wave spectrum has sparked interest recently as a promising alternative to meet bandwidth requirements for wireless local area networks, vehicular radars, short-range multi-Gb/s links, and next-generation cellular system communications (5G).
Kheirabi, Nazli
core
Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS-MEMS Technique. [PDF]
Micromachines (Basel), 2020 Shen WC +4 more
europepmc +1 more source
CMOS-MEMS Technology and Its Application to Micromirror Devices
, 2007 本文討論以晶圓代工方式進行微機電系統(MEMS)裝置的研究方法，並以兩種不同型式之微型鏡面元件作為測試平台進行CMOS-MEMS裝置的設計和製程可行性驗證。與積體電路相容之微機電技術(CMOS-MEMS)提供一種極為彈性且頗具發展潛力的整合製作方法。其採用既有的標準化半導體製程(CMOS process)可將微電子電路以及微機電微細結構透過相同的設計和驗證介面整合在一個晶片之上。然而，由於積體電路製程程序、電路元件模型和各層材料的特性等在晶圓廠便已調校固定 ...
鄭英周, Cheng, Ying-Chou
core
A CMOS MEMS-based Membrane-Bridge Nanomechanical Sensor for Small Molecule Detection. [PDF]
Sci Rep, 2020 Yen YK, Chiu CY.
europepmc +1 more source