Results 301 to 310 of about 53,870 (328)

Deep Reactive-Ion Etching (DRIE)

2011
openaire   +1 more source

Formation mechanism of multi-functional black silicon based on optimized deep reactive ion etching technique with SF6/C4F8

, 2015
F. Zhu, Xiao-Sheng Zhang, Haixia Zhang
semanticscholar   +1 more source

Deep Reactive-Ion Etching (DRIE)

2008
openaire   +1 more source

Annealing Behavior of Reactive Ion Etching Induced Deep Levels

Journal of The Electrochemical Society, 1990
D. Misra, E. L. Heasell
openaire   +1 more source

Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures

Microelectronics Journal, 2005
F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, T. Bourouina   +6 more
semanticscholar   +1 more source

Deep Reactive Ion Silicon Etching

2008
openaire   +1 more source

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

, 1996
E. Klaassen, K. Petersen, J. M. Noworolski, J. Logan, N. Maluf, Joseph J. Brown, C. Storment, Wendell Mcculley, G. Kovacs   +8 more
semanticscholar   +1 more source

Applications of Deep Reinforcement Learning in Communications and Networking: A Survey

IEEE Communications Surveys and Tutorials, 2019
Nguyen Cong Luong, Dinh Thai Hoang, Shimin Gong   +2 more
exaly  

Accelerated Publication: Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio

, 2014
J. Parasuraman, A. Summanwar, F. Marty, P. Basset, D. Angelescu, T. Bourouina   +5 more
semanticscholar   +1 more source

Single-step deep reactive ion etching of ultra-deep silicon cavities with smooth sidewalls

, 2014
R. Chutani, M. Hasegawa, V. Maurice, N. Passilly, C. Gorecki   +4 more
semanticscholar   +1 more source