Results 281 to 286 of about 8,725 (286)

Analysis of sidewall quality in through-wafer deep reactive-ion etching

Microelectronic Engineering, 2004
exaly   +2 more sources

Reduction of isotropic etch for silicon nanowires created by metal assisted deep reactive ion etching

International Journal of Nanotechnology, 2018
Tung Thanh Bui, Chien Mau Dang
exaly  

Deep reactive ion etching

2020
Franz Laermer
exaly  

Deep Reactive Ion Etching

2015
Franz Laermer, Sami Franssila
exaly  

A method to evade silicon backside damage in deep reactive ion etching for anodically bonded glass–silicon structures

Sensors and Actuators A: Physical, 2001
exaly  

Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide

2001
openaire   +1 more source