Results 271 to 280 of about 8,725 (286)
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Deep Vertical Etching of Silicon Wafers Using a Hydrogenation-Assisted Reactive Ion Etching
Journal of Microelectromechanical Systems, 2007Shams Mohajerzadeh
exaly
Superhydrophobic surfaces by dynamic nanomasking and deep reactive ion etching
Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems, 2007Min Zou
exaly

