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Microfluidic device based on deep reactive ion etching process and its lag effect for single cell capture and extraction

Sensors and Actuators B: Chemical, 2018
Jianguo Feng   +2 more
exaly  

Deep Vertical Etching of Silicon Wafers Using a Hydrogenation-Assisted Reactive Ion Etching

Journal of Microelectromechanical Systems, 2007
Shams Mohajerzadeh
exaly  

Superhydrophobic surfaces by dynamic nanomasking and deep reactive ion etching

Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems, 2007
Min Zou
exaly  

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