Results 131 to 140 of about 5,264 (183)
Some of the next articles are maybe not open access.
DRIE based novel technique for AFM probes fabrication
Microelectronic Engineering, 2007Luis Guillermo Villanueva +2 more
exaly
Scalloping and Stress Concentration in DRIE-Manufactured Comb-Drives
Actuators, 2018Matteo Verotti +2 more
exaly
Advanced fiber optical switches using deep RIE (DRIE) fabrication
Sensors and Actuators A: Physical, 2003A Q Liu
exaly
Scalloping removal on DRIE via using low concentrated alkaline solutions at low temperature
Sensors and Actuators A: Physical, 2011Thomas Defforge +2 more
exaly
On the single-chip condenser miniature microphone using DRIE and backside etching techniques
Sensors and Actuators A: Physical, 2003Zhimin Tan
exaly
Zoekacties: Drie partijen, drie uitkomsten.
Adoptietijdschrift, 2004Van Berkel, D.A.M., Kaptein, D.
openaire +1 more source

