Results 131 to 140 of about 5,282 (184)
Some of the next articles are maybe not open access.
Smoothening of scalloped DRIE trench walls
Materials Science in Semiconductor Processing, 2017Sheel Aditya
exaly
Scalloping and Stress Concentration in DRIE-Manufactured Comb-Drives
Actuators, 2018Nicola Pio Belfiore +2 more
exaly
Zoekacties: Drie partijen, drie uitkomsten.
Adoptietijdschrift, 2004Van Berkel, D.A.M., Kaptein, D.
openaire +1 more source
DRIE based novel technique for AFM probes fabrication
Microelectronic Engineering, 2007Joan Bausells +2 more
exaly
Advanced fiber optical switches using deep RIE (DRIE) fabrication
Sensors and Actuators A: Physical, 2003A Q Liu
exaly
On the single-chip condenser miniature microphone using DRIE and backside etching techniques
Sensors and Actuators A: Physical, 2003Zhimin Tan
exaly