Results 151 to 160 of about 5,264 (183)
Some of the next articles are maybe not open access.
A Multistep DRIE Process for Complex Terahertz Waveguide Components
IEEE Transactions on Terahertz Science and Technology, 2016Cecile Jung-Kubiak +2 more
exaly
Development of Si DRIE process allowing simultaneous etching from narrow and wide mask openings
Electronics and Communications in Japan, 2011Junji Ohara, Yukihiro Takeuchi
exaly
Silicon Micromachined W-Band Hybrid Coupler and Power Divider Using DRIE Technique
IEEE Microwave and Wireless Components Letters, 2008exaly
Drie keer Nederland, drie keer gefaald
Stedebouw & Ruimtelijke Ordening, 2001openaire +1 more source
Development of DRIE for the Next Generation of MEMS Devices
NATO Science for Peace and Security Series B: Physics and Biophysics, 2010exaly

