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Design and Fabrication of DRIE-Patterned Complex Needlelike Silicon Structures

Journal of Microelectromechanical Systems, 2010
Luis Fernando Velasquez-Garcia
exaly  

Scalloping removal on DRIE via using low concentrated alkaline solutions at low temperature

Sensors and Actuators A: Physical, 2011
Thomas Defforge   +2 more
exaly  

Development of DRIE for the Next Generation of MEMS Devices

NATO Science for Peace and Security Series B: Physics and Biophysics, 2010
exaly  

Drie boegbeelden

Vakblad Sociaal Werk, 2020
openaire   +1 more source

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