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Design and Fabrication of DRIE-Patterned Complex Needlelike Silicon Structures
Journal of Microelectromechanical Systems, 2010Luis Fernando Velasquez-Garcia
exaly
Scalloping removal on DRIE via using low concentrated alkaline solutions at low temperature
Sensors and Actuators A: Physical, 2011Thomas Defforge +2 more
exaly
Development of DRIE for the Next Generation of MEMS Devices
NATO Science for Peace and Security Series B: Physics and Biophysics, 2010exaly
Drie keer Nederland, drie keer gefaald
Stedebouw & Ruimtelijke Ordening, 2001openaire +1 more source

