Results 171 to 180 of about 54,079 (223)

Smoothening of scalloped DRIE trench walls

Materials Science in Semiconductor Processing, 2017
Sheel Aditya
exaly  

Drie gedichten

Dutch Crossing, 1982
Willem Elsschot, William Woods, P.J. Large, Barry Birch   +3 more
openaire   +1 more source

DRIE based novel technique for AFM probes fabrication

Microelectronic Engineering, 2007
Luis Guillermo Villanueva, Joan Bausells, J A Plaza   +2 more
exaly  

Advanced fiber optical switches using deep RIE (DRIE) fabrication

Sensors and Actuators A: Physical, 2003
A Q Liu
exaly  

Drie vragen aan…

Zorg + Welzijn, 2017
openaire   +1 more source

Scalloping and Stress Concentration in DRIE-Manufactured Comb-Drives

Actuators, 2018
Nicola Pio Belfiore, Pierluigi Bellutti, Giuseppe Ruta   +2 more
exaly  

Zoekacties: Drie partijen, drie uitkomsten.

Adoptietijdschrift, 2004
Van Berkel, D.A.M., Kaptein, D.
openaire   +1 more source

Scalloping removal on DRIE via using low concentrated alkaline solutions at low temperature

Sensors and Actuators A: Physical, 2011
Thomas Defforge, Rémi Dussart, francois Tran-Van   +2 more
exaly  

Micromachining of Titanium using a Desktop DRIE

IEEJ Transactions on Sensors and Micromachines, 2014
Masayuki Sohgawa, Takashi Abe
exaly  

On the single-chip condenser miniature microphone using DRIE and backside etching techniques

Sensors and Actuators A: Physical, 2003
Zhimin Tan, Litian Liu
exaly