Results 191 to 200 of about 54,079 (223)

DRIE based technology for 3D silicon barcodes fabrication

Sensors and Actuators B: Chemical, 2011
Jaume Esteve, Marta Duch, Rodrigo Gómez-Martínez   +2 more
exaly  

New DRIE Process with Sidewall Protection Layer Formed by O2 Plasma Irradiation

IEEJ Transactions on Sensors and Micromachines, 2003
Yukihiro Takeuchi, Junji Ohara
exaly  

Modelling and simulations of DRIE including a footing effect

International Journal of Computational Materials Science and Surface Engineering, 2009
Qing-An Huang, Wei-Hua Li
exaly  

Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)

Journal of Microelectromechanical Systems, 2002
Kuo-Shen Chen, Xin Zhang, S M Spearing
exaly  

A high-performance scintillator-silicon-well X-ray microdetector based on DRIE techniques

Sensors and Actuators A: Physical, 2001
J G Rocha
exaly  

A systematic study of DRIE process for high aspect ratio microstructuring

Vacuum, 2010
P J George, Manish Kumar Hooda
exaly  

Drie gebouwen, drie metaforen, drie visioenen

2000
openaire   +1 more source

Drie tijdsopvattingen en drie mensbeelden

Filosofie in bedrijf, 1998
openaire   +1 more source

Silicon Micromachined W-Band Hybrid Coupler and Power Divider Using DRIE Technique

IEEE Microwave and Wireless Components Letters, 2008
exaly  

Drie vrouwen, drie levens, één oorlog

Icodo-Info, 1996
openaire   +1 more source