Results 181 to 190 of about 54,079 (223)
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Design and Fabrication of DRIE-Patterned Complex Needlelike Silicon Structures
Journal of Microelectromechanical Systems, 2010Luis Fernando Velásquez-García +1 more
exaly
3D project: drie praktijken, drie perspectieven en drie stappen
2019van der Slot, Jacoline +2 more
openaire
Development of DRIE for the Next Generation of MEMS Devices
NATO Science for Peace and Security Series B: Physics and Biophysics, 2010J Hopkins
exaly
A Multistep DRIE Process for Complex Terahertz Waveguide Components
IEEE Transactions on Terahertz Science and Technology, 2016Goutam Chattopadhyay +2 more
exaly

