Results 141 to 150 of about 5,282 (184)

DRIE based technology for 3D silicon barcodes fabrication

Sensors and Actuators B: Chemical, 2011
Jaume Esteve, Marta Duch, Rodrigo Gomez-Martinez   +2 more
exaly  

Modelling and simulations of DRIE including a footing effect

International Journal of Computational Materials Science and Surface Engineering, 2009
Qing-An Huang
exaly  

3D project: drie praktijken, drie perspectieven en drie stappen

2019
van der Slot, Jacoline, Buis, Nynke, Kassenberg, Annelies   +2 more
openaire  

Micromachining of Titanium using a Desktop DRIE

IEEJ Transactions on Sensors and Micromachines, 2014
Masayuki Sohgawa
exaly  

Drie bloedgroepen of een drie-eenheid?

1993
Hajema, Klaasjan, van Schuur, Wijbrandt, Voerman, Gerrit   +2 more
openaire   +1 more source

DRIE based technology for 3D silicon barcodes fabrication

Procedia Chemistry, 2009
Jaume Esteve, Marta Duch, Rodrigo Gomez-Martinez   +2 more
exaly  

New DRIE Process with Sidewall Protection Layer Formed by O 2 Plasma Irradiation

IEEJ Transactions on Sensors and Micromachines, 2003
Kazuhiko Kano, Yukihiro Takeuchi
exaly  

Drie decennia, drie vondsten

2020
openaire   +1 more source

One-mask process for silicon accelerometers on Pyrex glass utilising notching effect in inductively coupled plasma DRIE

Electronics Letters, 2003
Ciprian Iliescu
exaly  

P-G2-6 Micromachining of titanium using a desktop DRIE

The Proceedings of the Symposium on Micro-Nano Science and Technology, 2012
Takashi Abe
exaly