Results 141 to 150 of about 5,264 (183)

Micromachining of Titanium using a Desktop DRIE

IEEJ Transactions on Sensors and Micromachines, 2014
Masayuki Sohgawa, Takashi Abe
exaly  

3D project: drie praktijken, drie perspectieven en drie stappen

2019
van der Slot, Jacoline, Buis, Nynke, Kassenberg, Annelies   +2 more
openaire  

One-mask process for silicon accelerometers on Pyrex glass utilising notching effect in inductively coupled plasma DRIE

Electronics Letters, 2003
Ciprian Iliescu
exaly  

DRIE based technology for 3D silicon barcodes fabrication

Sensors and Actuators B: Chemical, 2011
Rodrigo Gomez-Martinez, Marta Duch, J Esteve   +2 more
exaly  

Design and Fabrication of DRIE-Patterned Complex Needlelike Silicon Structures

Journal of Microelectromechanical Systems, 2010
Luis Fernando Velasquez-Garcia, Akintunde Ibitayo Akinwande   +1 more
exaly  

New DRIE Process with Sidewall Protection Layer Formed by O 2 Plasma Irradiation

IEEJ Transactions on Sensors and Micromachines, 2003
Junji Ohara, Kazuhiko Kano, Yukihiro Takeuchi   +2 more
exaly  

Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)

Journal of Microelectromechanical Systems, 2002
Kuo-Shen Chen, Xin Zhang, S M Spearing   +2 more
exaly  

Drie bloedgroepen of een drie-eenheid?

1993
Hajema, Klaasjan, van Schuur, Wijbrandt, Voerman, Gerrit   +2 more
openaire   +1 more source

Modelling and simulations of DRIE including a footing effect

International Journal of Computational Materials Science and Surface Engineering, 2009
Qing-An Huang
exaly  

A systematic study of DRIE process for high aspect ratio microstructuring

Vacuum, 2010
Manish Kumar Hooda
exaly