Results 181 to 190 of about 183,782 (223)
Some of the next articles are maybe not open access.
Scalloping and Stress Concentration in DRIE-Manufactured Comb-Drives
Actuators, 2018Matteo Verotti +2 more
exaly
DRIE based novel technique for AFM probes fabrication
Microelectronic Engineering, 2007Ja Plaza, Joan Bausells
exaly
Vertical Mirror Fabrication Combining KOH Etch and DRIE of (110) Silicon
Journal of Microelectromechanical Systems, 2009Kyoungsik Yu, Olav Solgaard
exaly
DRIE based technology for 3D silicon barcodes fabrication
Sensors and Actuators B: Chemical, 2011Marta Duch, Jaume Esteve, Ja Plaza
exaly
Micromachining of Titanium using a Desktop DRIE
IEEJ Transactions on Sensors and Micromachines, 2014Masayuki Sohgawa
exaly

