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Design and Fabrication of DRIE-Patterned Complex Needlelike Silicon Structures
Journal of Microelectromechanical Systems, 2010exaly
Silicon Micromachined W-Band Hybrid Coupler and Power Divider Using DRIE Technique
IEEE Microwave and Wireless Components Letters, 2008exaly
On the single-chip condenser miniature microphone using DRIE and backside etching techniques
Sensors and Actuators A: Physical, 2003exaly
Drie keer Nederland, drie keer gefaald
Stedebouw & Ruimtelijke Ordening, 2001openaire +1 more source

