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Droplet etching during semiconductor epitaxy for single and coupled quantum structures
Quantum Dots and Nanostructures: Growth, Characterization, and Modeling XV, 2018We give an overview on the present status of self-assembled quantum structure fabrication by using the local droplet etching (LDE) technique during semiconductor molecular-beam epitaxy (MBE). LDE functionalizes nanodroplets to drill spatially well separated nanoholes into semiconductor surfaces.
Wolfgang Hansen +3 more
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Local etching of nanoholes and quantum rings with InxGa1−x droplets
Journal of Applied Physics, 2009We study the formation of nanoholes and quantum rings in GaAs and AlGaAs surfaces by local droplet etching with InxGa1−x. The rings are crystallized from droplet material and surround the nanohole openings. In particular, the influence of the In content x on density, diameter, and depth of the nanoholes is investigated.
A. Stemmann +6 more
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Direct Etch Method for Microfluidic Channel and Nano-Height Post Fabrication by Picoliter Droplets
19th IEEE International Conference on Micro Electro Mechanical Systems, 2006Photolithography is an expensive and significant step in microfabrication. Approaches that could change lithography would create an impact on semiconductor industry and microelectromechanical systems technologies. We demonstrate a direct etching method by ejecting etchant droplets at desired locations by using microdroplet ejector arrays.
Utkan Demirci, Mehmet Toner
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Density limits of high temperature and multiple local droplet etching on AlAs
Journal of Crystal Growth, 2014Abstract The density of nanoholes created by self-assembled Al droplet etching of AlAs surfaces during molecular beam epitaxy is studied. We find a clear decrease of the hole density with increasing etching temperature T up to a threshold temperature T = 620 ° C . At T > 620 ° C , the hole density saturates at a minimum of 2 ×
J. Kerbst +3 more
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Shallow surface etching of organic and inorganic compounds by electrospray droplet impact
Applied Surface Science, 2009Abstract The electrospray droplet impact (EDI) was applied to bradykinin, polyethylene terephthalate (PET), SiO2/Si, and indium phosphide (InP). It was found that bradykinin deposited on the stainless steel substrate was ionized/desorbed without the accumulation of radiation products.
Kenzo Hiraoka +4 more
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Local Droplet Etching: Self-assembled Nanoholes for Quantum Dots and Nanopillars
2013We review the mechanism and recent applications of the self-organized patterning of semiconductor surfaces by local droplet etching (LDE). LDE is a nanofabrication technique that is applicable in situ during molecular beam epitaxy (MBE) and fully compatible with state-of-the-art MBE systems.
Christian Heyn +2 more
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Full wafer property control of local droplet etched GaAs quantum dots
Journal of Crystal Growth, 2022Hans-Georg Babin +5 more
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