Results 241 to 250 of about 225,755 (264)

Shallow surface etching of organic and inorganic compounds by electrospray droplet impact

Applied Surface Science, 2009
Abstract The electrospray droplet impact (EDI) was applied to bradykinin, polyethylene terephthalate (PET), SiO2/Si, and indium phosphide (InP). It was found that bradykinin deposited on the stainless steel substrate was ionized/desorbed without the accumulation of radiation products.
Kenzo Hiraoka, Daiki Asakawa, Yoshitoki Iijima   +2 more
exaly   +2 more sources

Local droplet etching of nanoholes and rings on GaAs and AlGaAs surfaces

Applied Physics Letters, 2008
We study the formation of nanoholes and rings on GaAs and AlGaAs surfaces by local droplet etching (LDE) with gallium and indium. The nanohole properties are tuned by variation in etching temperature and time as well as by the etchant. Nanoholes fabricated by In LDE are larger and have an about ten times lower density compared to Ga LDE, which allows ...
Christian Heyn, A Stemmann, T Kipp
exaly   +2 more sources

Alloying during local droplet etching of AlGaAs surfaces with aluminium

Journal of Applied Physics, 2019
Local droplet etching (LDE) drills self-assembled nanoholes into AlGaAs surfaces and represents a powerful technique for the fabrication of versatile quantum structures like quantum dots, rings, and molecules. Usually, LDE is performed at temperatures T=600−680°C if Al is used as the etching material.
M. Zocher, Ch. Heyn, W. Hansen
openaire   +1 more source

GaAs quantum dot molecules filled into droplet etched nanoholes

Journal of Crystal Growth, 2017
Abstract We fabricate self-aligned vertically stacked GaAs quantum dot molecules (QDMs) by filling of self-assembled nanoholes in AlGaAs. The tunable nanoholes are created using local droplet etching (LDE) combining conventional molecular beam epitaxy with self-assembled, lithography-free patterning. The optical emission from single, strain-free QDMs
Ch. Heyn, A. Küster, A. Gräfenstein, A. Ungeheuer, A. Graf, W. Hansen   +5 more
openaire   +1 more source

Nanohole formation on AlGaAs surfaces by local droplet etching with gallium

Journal of Crystal Growth, 2009
; A1. Atomic force microscopy ; A1. Diffusion ; A1. Low-dimensional structures ; A3. Molecular beam epitaxy ; B2. Semiconducting III-V materials We demonstrate the self-assembled generation of nanoholes on AlGaAs surfaces by local droplet etching (LDE).
Ch. Heyn, A. Stemmann, W. Hansen
openaire   +1 more source

Local etching of nanoholes and quantum rings with InxGa1−x droplets

Journal of Applied Physics, 2009
We study the formation of nanoholes and quantum rings in GaAs and AlGaAs surfaces by local droplet etching with InxGa1−x. The rings are crystallized from droplet material and surround the nanohole openings. In particular, the influence of the In content x on density, diameter, and depth of the nanoholes is investigated.
A. Stemmann, T. Köppen, M. Grave, S. Wildfang, S. Mendach, W. Hansen, Ch. Heyn   +6 more
openaire   +1 more source

Direct Etch Method for Microfluidic Channel and Nano-Height Post Fabrication by Picoliter Droplets

19th IEEE International Conference on Micro Electro Mechanical Systems, 2006
Photolithography is an expensive and significant step in microfabrication. Approaches that could change lithography would create an impact on semiconductor industry and microelectromechanical systems technologies. We demonstrate a direct etching method by ejecting etchant droplets at desired locations by using microdroplet ejector arrays.
Utkan Demirci, Mehmet Toner
openaire   +1 more source

Local droplet etching – Nanoholes, quantum dots, and air-gap heterostructures

AIP Conference Proceedings, 2014
Local droplet etching (LDE) allows the self-organized generation of nanoholes in semiconductor surfaces and is fully compatible with molecular beam epitaxy (MBE). The influence of the process parameters as well as of droplet and substrate materials on the LDE nanohole morphology is discussed.
Ch. Heyn, D. Sonnenberg, A. Graf, J. Kerbst, A. Stemmann, W. Hansen   +5 more
openaire   +1 more source

Droplet etching during semiconductor epitaxy for single and coupled quantum structures

Quantum Dots and Nanostructures: Growth, Characterization, and Modeling XV, 2018
We give an overview on the present status of self-assembled quantum structure fabrication by using the local droplet etching (LDE) technique during semiconductor molecular-beam epitaxy (MBE). LDE functionalizes nanodroplets to drill spatially well separated nanoholes into semiconductor surfaces.
Wolfgang Hansen, Achim Küster, Michael Zocher, Christian Heyn   +3 more
openaire   +1 more source

Density limits of high temperature and multiple local droplet etching on AlAs

Journal of Crystal Growth, 2014
Abstract The density of nanoholes created by self-assembled Al droplet etching of AlAs surfaces during molecular beam epitaxy is studied. We find a clear decrease of the hole density with increasing etching temperature T up to a threshold temperature T = 620 ° C . At T > 620 ° C , the hole density saturates at a minimum of 2 ×
J. Kerbst, Ch. Heyn, T. Slobodskyy, W. Hansen   +3 more
openaire   +1 more source