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Droplet etched GaAs quantum dots close to surfaces and metallic interfaces

Journal of Applied Physics, 2017
GaAs quantum dots (QDs) with a thin cap layer are studied as building blocks for self-aligned hybrids with a metallic nanostructure (MN). Both constituents are filled into a nanohole template that is drilled into an AlGaAs surface by self-assembled local droplet etching during molecular beam epitaxy.
Ch. Heyn +5 more
openaire +1 more source

Local droplet etching – Nanoholes, quantum dots, and air-gap heterostructures

AIP Conference Proceedings, 2014
Local droplet etching (LDE) allows the self-organized generation of nanoholes in semiconductor surfaces and is fully compatible with molecular beam epitaxy (MBE). The influence of the process parameters as well as of droplet and substrate materials on the LDE nanohole morphology is discussed.
Ch. Heyn +5 more
openaire +1 more source

Local Droplet Etching: Self-assembled Nanoholes for Quantum Dots and Nanopillars

2013
We review the mechanism and recent applications of the self-organized patterning of semiconductor surfaces by local droplet etching (LDE). LDE is a nanofabrication technique that is applicable in situ during molecular beam epitaxy (MBE) and fully compatible with state-of-the-art MBE systems.
Christian Heyn, David Sonnenberg, Wolfgang Hansen +2 more
openaire +1 more source

Droplet etching: Application to Quantum Dots and Nanopillars for Thermoelectrics