Results 1 to 10 of about 27,823 (260)

Non‐Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication

Advanced Materials, 2011
Ville Jokinen, Sami Franssila, Ali Shāh   +2 more
exaly  

Computer simulation of a CF4plasma etching silicon

Journal of Applied Physics, 1984
Daniel L Flamm, Flamm Daniel L
exaly  

Plasma etch system

1996
LEIBOVICH VLADIMIR E, ZUCKER MARTIN L
openaire   +3 more sources

Plasma Etching

1983
J. A. MUCHA, D. W. HESS
openaire   +1 more source

Plasma-assisted etching

Plasma Chemistry and Plasma Processing, 1982
J W Coburn, Coburn J W
exaly  

ENHANCED PLASMA ETCHING

1988
EGITTO, FRANK DANIEL, MLYNKO, WALTER EUGENE   +1 more
openaire   +3 more sources

Plasma Etching

2012
Patrick M. Winter, Gregory M. Lanza, Samuel A. Wickline, Marc Madou, Chunlei Wang, Parag B. Deotare, Marko Loncar, Yoke Khin Yap, Jérôme Rose, Mélanie Auffan, Olivier Proux, Vincent Niviere, Jean-Yves Bottero, Zhong Lin Wang, Ying Liu, R. G. Polcawich, J. S. Pulskamp, R. M. Proie, Woo-Tae Park, Sergei V. Kalinin, Brian J. Rodriguez, Andrei L. Kholkin, Gang Logan Liu, Jao Lagemaat, Lorenzo Valdevit, John W. Hutchinson, Seajin Oh, Marc Madou, Katja Tonisch, Enrica De Rosa, Joseph Fernandez-Moure, Ennio Tasciotti, Denis Gebauer, Brian E. O’Neill, King C. Li   +34 more
openaire   +1 more source

Mechanism of anisotropic etching on diamond (111) surfaces by a hydrogen plasma treatment

Applied Surface Science, 2017
Satoshi Yamasaki, Tsubasa Matsumoto, Toshiharu Makino   +2 more
exaly  

Simulations of Si and SiO2 etching in SF6+O2 plasma

Vacuum, 2009
Rimantas Knizikevičius
exaly  

Plasma etching method and plasma etching apparatus

2013
SATAKE MAKOTO, MAEDA KENJI, YOKOGAWA KENETSU, TETSUKA TSUTOMU, USUI TATEHITO, NISHIO RYOJI   +5 more
openaire   +1 more source