Results 281 to 290 of about 1,014,878 (298)

Dry Etching for VLSI

1991
A. J. van Roosmalen, J. A. G. Baggerman, S. J. H. Brader   +2 more
openaire   +1 more source

Method and apparatus for dry etching

1993
TAKAO KUMIHASHI, KAZUNORI TSUJINOTO, SHINICHI TACHI   +2 more
openaire   +8 more sources

Photochemical dry etching method

1993
NISHIZAWA JUN-ICHI, YAMAMOTO KENJI
openaire   +2 more sources

Dry etching method of GaAs

1993
KADOMURA, SHINGO, SATO, JUNICHI
openaire   +4 more sources

Dry etching by alternately etching and depositing

1991
OKUDAIRA SADAYUKI, KAWAKAMI HIROSHI, KURE TOKUO, TSUJIMOTO KAZUNORI, TACHI SHINICHI   +4 more
openaire   +1 more source

DRY ETCHING METHOD AND ETCHING DEVICE

2018
YAMAUCHI KUNIHIRO, MASUDA TAKASHI, YAO AKIFUMI   +2 more
openaire   +1 more source

Dry etching agent, dry etching method and method for producing semiconductor device

2018
OOMORI HIROYUKI, YAO AKIFUMI, KASHIWABA TAKASHI   +2 more
openaire   +2 more sources

Dry etch process for forming champagne profiles, and dry etch apparatus

1991
KURASAKI HOWARD S, WESTLUND BARBARA F, NULTY JAMES E, VOWLES E JOHN   +3 more
openaire   +1 more source

Dry etching

2005
openaire   +1 more source

Dry etching system and dry etching method using plasma

2000
openaire   +1 more source