Results 261 to 270 of about 1,014,878 (298)

Dry etching of AlN films using the plasma generated by fluoride

Vacuum, 2008
Yafei ZHANG
exaly  

Fabrication of magnetic recording heads and dry etching of head materials

IBM Journal of Research and Development, 1999
R Hsiao
exaly  

Accurate dry etching technique for germanium waveguide by using CHF3 based inductively coupled plasma

Electronics Letters, 2016
Kiichi Hamamoto
exaly  

Etching—Applications and Trends of Dry Etching

1988
L. M. Ephrath, G. S. Mathad
openaire   +1 more source

Monocrystalline Quartz ICP Etching: Road to High-Temperature Dry Etching

Plasma Chemistry and Plasma Processing, 2019
Artem Osipov, Gleb Iankevich
exaly  

Dry etching method for semiconductor.

1991
KOTAKI MASAHIRO, MANABE KATSUHIDE, MORI MASAKI, HASHIMOTO MASAFUMI   +3 more
openaire   +3 more sources

Dry Etching

2018
openaire   +1 more source

Effects of 3D microlens transfer into fused silica substrate by CF/O dry etching

Applied Surface Science, 2017
Mindaugas Andrulevičius, Algirdas Lazauskas, Dalius Jucius   +2 more
exaly  

Dry Etching

2008
openaire   +1 more source

The application of secondary effects in high aspect ratio dry etching for the fabrication of MEMS

Microelectronic Engineering, 2001
Ivan Kostic, I W Rangelow
exaly