Results 261 to 263 of about 17,748 (263)
Some of the next articles are maybe not open access.
Dry Chemical Etch
2015
openaire
copy doi
(10.1007/978-1-4614-5491-5_200042)
openaccessbutton.org (pdf)
+1 more source
Computational models of dry etching
Vacuum
, 1988
openaire
copy doi
(10.1016/0042-207x(88)90516-7)
openaccessbutton.org (pdf)
+1 more source
Dry etching at IEMN
2019
openaire
hal.science
+1 more source
wet etching
physics
ion implantation
7. clean energy
micro-led
femtosecond laser
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