Results 251 to 260 of about 1,014,878 (298)

Dry etching method

1989
OKUDAIRA SADAYUKI, TSUJIMOTO KAZUNORI, TACHI SHINICHI   +2 more
openaire   +3 more sources

High ion density dry etching of compound semiconductors

Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 1996
S J Pearton
exaly  

DRY ETCHING GAS COMPOSITION AND DRY ETCHING METHOD

2020
KATO KOREHITO, IKETANI YOSHIHIKO, SHIBUSAWA YUKINOBU, SHIMIZU HISASHI   +3 more
openaire   +1 more source

Dry phosphorus silicate glass etching for multicrystalline silicon solar cells

Progress in Photovoltaics: Research and Applications, 2003
D Borchert, H Kurz
exaly  

Passivation of dry-etching damage using low-energy hydrogen implants

IEEE Electron Device Letters, 1983
S Ashok, S J Fonash
exaly  

Dry etching method

1992
NISHIBE, TOHRU, NUNOUE, SHINYA, KUROBE, ATSUSHI   +2 more
openaire   +2 more sources

High throughput, high quality dry etching of copper/barrier film stacks

Microelectronic Engineering, 2000
T Gessner
exaly  

Plasma-based dry etching techniques in the silicon integrated circuit technology

IBM Journal of Research and Development, 1992
Gottlieb S Oehrlein
exaly  

Dry etching method, and dry etching agent and storage container therefor

2022
OOMORI HIROYUKI, KAMIDA TATSUNORI, IKEDA SHINYA   +2 more
openaire   +2 more sources

Dry-etching process.

1986
GOBRECHT, JENS, DR., ROSSINELLI, MARCO, DR.   +1 more
openaire   +2 more sources