Results 251 to 260 of about 17,748 (263)

High throughput, high quality dry etching of copper/barrier film stacks

Microelectronic Engineering, 2000
exaly  

Dry Chemical Etch

2011
openaire   +1 more source

Dry Chemical Etch

2008
openaire   +1 more source

Dry Etching for VLSI—A Review

Journal of The Electrochemical Society, 1982
openaire   +1 more source

Fabrication of magnetic recording heads and dry etching of head materials

IBM Journal of Research and Development, 1999
exaly  

Dry Etching of SiC

2000
openaire   +1 more source

Dry etching of AlN films using the plasma generated by fluoride

Vacuum, 2008
exaly  

Physical Dry Etching

2016
openaire   +1 more source

Dry etching of SiO2 and Si3N4

Microelectronics Reliability, 1987
openaire   +1 more source

Dry etching properties of methyl-BCN film with C4F8 gas for Cu/low-k interconnection

Diamond and Related Materials, 2010
exaly