Results 251 to 259 of about 18,248 (259)

DRY ETCHING METHOD AND ETCHING DEVICE

2018
YAMAUCHI KUNIHIRO, MASUDA TAKASHI, YAO AKIFUMI   +2 more
openaire   +1 more source

Dry etching by alternately etching and depositing

1991
OKUDAIRA SADAYUKI, KAWAKAMI HIROSHI, KURE TOKUO, TSUJIMOTO KAZUNORI, TACHI SHINICHI   +4 more
openaire   +1 more source

Dry etching

2005
openaire   +1 more source

Dry etch process for forming champagne profiles, and dry etch apparatus

1991
KURASAKI HOWARD S, WESTLUND BARBARA F, NULTY JAMES E, VOWLES E JOHN   +3 more
openaire   +1 more source

Dry etching method

1996
NISHIZAWA JUN-ICHI, YAMAMOTO KENJI
openaire   +1 more source

Dry-etching method

2000
KUMIHASHI TAKAO, TSUJIMOTO KAZUNORI, TACHI SHINICHI   +2 more
openaire   +1 more source

Dry etching method, microfabrication process and dry etching mask

2004
openaire   +1 more source

DRY ETCHING APPARATUS

1992
ONO KOUICHI, OOMORI TATSUO
openaire   +1 more source

Dry etching system and dry etching method using plasma

2000
openaire   +1 more source